Abstract
In this work we propose a design based on a nanoelectromechanical relay acting as a logic gate inverter. The proposed inverter is made of a double cantilever nanobeam actuated by a fixed central electrode carrying the input signals. The static and dynamic behaviors of the ohmic nanoinverter gate are investigated using an electromechanical mathematical model that fully incorporates nonlinear form of the electrostatic force and the ohmic contact of the nanobeams’ tip with the fixed output electrode. The derived electromechanical model is used for electrical and energy analysis. Simulations are used to confirm the functionality of the inverter. The analysis of the switching energy showed very low power consumption compared to classical CMOS inverters. It is shown that the proposed inverter dissipates only 0.45 fJ to code a “1” logic-state and 0.023 fJ to code a “0” logic-state.
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References
Bellaouar, A., & Elmasry, M. (2012). Low-power digital VLSI design: Circuits and systems. Berlin: Springer.
Birleanu, C., & Pustan, M. (2015). Analysis of the adhesion effect in RF-mems switches using atomic force microscope. Analog Integrated Circuits and Signal Processing, 82(3), 571–581.
Blaauw, D., & Zhai, B. (2006). Energy efficient design for subthreshold supply voltage operation. In Proceedings. 2006 IEEE international symposium on circuits and systems, 2006. ISCAS 2006. IEEE, 4 pp.
Calhoun, B. H., & Chandrakasan, A. (2004). Characterizing and modeling minimum energy operation for subthreshold circuits. In Proceedings of the 2004 international symposium on Low power electronics and design, ACM, pp. 90–95.
Chandrakasan, A. P., & Brodersen, R. W. (1995). Minimizing power consumption in digital CMOS circuits. Proceedings of the IEEE, 83(4), 498–523.
Chandrakasan, A. P., Sheng, S., & Brodersen, R. W. (1992). Low-power CMOS digital design. IEICE Transactions on Electronics, 75(4), 371–382.
Girbau, D., Lazaro, A., & Pradell, L. (2003). RF MEMS switches based on the buckle-beam thermal actuator. In 33rd European Microwave Conference, 2003, Vol. 2. IEEE, pp. 651–654.
Gross, S., Zhang, Q., Trolier-McKinstry, S., Tadigadapa, S., & Jackson, T. (2003). RF MEMS piezoelectric switch. In Device research conference, 2003. IEEE, pp. 99–100.
Gupta, R. K. (1996). Pull-in dynamics of electrostatically-actuated beams. In Proceedings of solid-state sensor and actuator workshop (Hilton Head 1996), Hilton Head Island, SC, June 3–6, pp. 1–2.
Hah, D., & Hong, S. (2000). A low-voltage actuated micromachined microwave switch using torsion springs and leverage. IEEE Transactions on Microwave theory and techniques, 48(12), 2540–2545.
Hanson, S., Zhai, B., Bernstein, K., Blaauw, D., Bryant, A., Chang, L., et al. (2006). Ultralow-voltage, minimum-energy CMOS. IBM Journal of Research and Development, 50(4.5), 469–490.
Houri, S., Poulain, C., Valentian, A., & Fanet, H. (2013). Performance limits of nanoelectromechanical switches (NEMS)-based adiabatic logic circuits. Journal of Low Power Electronics and Applications, 3(4), 368–384.
Houri, S., Billiot, G., Belleville, M., Valentian, A., & Fanet, H. (2015). Limits of CMOS technology and interest of NEMS relays for adiabatic logic applications. IEEE Transactions on Circuits and Systems I: Regular Papers, 62(6), 1546–1554.
Kam, H., Liu, T. J. K., Markovic, D., Alon, E., et al. (2011). Design, optimization, and scaling of mem relays for ultra-low-power digital logic. IEEE Transactions on Electron Devices, 58(1), 236–250.
Lee, S., Ramadoss, R., Buck, M., Bright, V., Gupta, K., & Lee, Y. (2004). Reliability testing of flexible printed circuit-based RF MEMS capacitive switches. Microelectronics Reliability, 44(2), 245–250.
Li, H., Ruan, Y., You, Z., & Song, Z. (2020). Design and fabrication of a novel MEMS relay with low actuation voltage. Micromachines, 11(2), 171.
Liu, A., Tang, M., Agarwal, A., & Alphones, A. (2005). Low-loss lateral micromachined switches for high frequency applications. Journal of Micromechanics and Microengineering, 15(1), 157.
Loh, O. Y., & Espinosa, H. D. (2012). Nanoelectromechanical contact switches. Nature Nanotechnology, 7(5), 283.
Meirovitch, L., & Parker, R. (2001). Fundamentals of vibrations. Applied Mechanics Reviews, 54, B100.
Morgenshtein, A. (2012). Short-circuit power reduction by using high-threshold transistors. Journal of Low Power Electronics and Applications, 2(1), 69–78.
Najar, F., Choura, S., El-Borgi, S., Abdel-Rahman, E., & Nayfeh, A. (2005). Modeling and design of variable-geometry electrostatic microactuators. Journal of Micromechanics and Microengineering, 15(3), 419.
Najar, F., Nayfeh, A., Abdel-Rahman, E., Choura, S., & El-Borgi, S. (2010). Nonlinear analysis of MEMS electrostatic microactuators: primary and secondary resonances of the first mode. Journal of Vibration and Control, 16(9), 1321–1349.
Najar, F., Ghommem, M., & Abdelkefi, A. (2020). Multifidelity modeling and comparative analysis of electrically coupled microbeams under squeeze-film damping effect. Nonlinear Dynamics, 99(1), 445–460.
Nayfeh, A. H., Younis, M. I., & Abdel-Rahman, E. M. (2007). Dynamic pull-in phenomenon in MEMS resonators. Nonlinear Dynamics, 48(1–2), 153–163.
Nowak, E. J. (2002). Maintaining the benefits of CMOS scaling when scaling bogs down. IBM Journal of Research and Development, 46(2.3), 169–180.
Parsa, R., Shavezipur, M., Lee, W., Chong, S., Lee, D., Wong, HS., Maboudian, R., & Howe, R. (2011). Nanoelectromechanical relays with decoupled electrode and suspension. In: 2011 IEEE 24th international conference on micro electro mechanical systems (MEMS). IEEE, pp. 1361–1364.
Patel, C. D., & Rebeiz, G. M. (2010). An RF-MEMS switch with MN contact forces. In: 2010 IEEE MTT-S international microwave symposium. IEEE, pp. 1242–1245.
Pawashe, C., Lin, K., & Kuhn, K. J. (2013). Scaling limits of electrostatic nanorelays. IEEE Transactions on Electron Devices, 60(9), 2936–2942.
Rebeiz, G. (2003). RF MEMS: Theory, design and technology. Hoboken: Wiley-Interscience.
Roukes, M. L. (2001). Nanoelectromechanical systems. In E. Obermeier (Ed.), Transducers ’01 Eurosensors XV. Berlin, Heidelberg: Springer.
Samaali, H., & Najar, F. (2017). Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage. Microsystem Technologies, 23(12), 5317–5327.
Samaali, H., Najar, F., Choura, S., Nayfeh, A. H., & Masmoudi, M. (2009). Novel design of MEMS ohmic RF switch with low voltage actuation. In 2009 3rd international conference on signals, circuits and systems (SCS). IEEE, pp. 1–5.
Samaali, H., Najar, F., Choura, S., Nayfeh, A. H., & Masmoudi, M. (2011). A double microbeam MEMS ohmic switch for RF-applications with low actuation voltage. Nonlinear Dynamics, 63(4), 719–734.
Samaali, H., Najar, F., & Choura, S. (2014). Dynamic study of a capacitive MEMS switch with double clamped-clamped microbeams. Shock and Vibration, 2014, 1–7. https://doi.org/10.1155/2014/807489.
Samaali, H., Najar, F., Ouni, B., & Choura, S. (2015a). MEMS SPDT microswitch with low actuation voltage for RF applications. Microelectronics International, 32(2), 55–62.
Samaali, H., Ouni, B., & Najar, F. (2015b). Design and modelling of MEMS DC–DC converter. Electronics Letters, 51(1), 860–861.
Samaali, H., Perrin, Y., Galisultanov, A., Fanet, H., Pillonnet, G., & Basset, P. (2019). Mems four-terminal variable capacitor for low power capacitive adiabatic logic with high logic state differentiation. Nano Energy, 55, 277–287.
Shavezipur, M., Harrison, K., Lee, W. S., Mitra, S., Wong, H. S. P., & Howe, R. T. (2015). Partitioning electrostatic and mechanical domains in nanoelectromechanical relays. Journal of Microelectromechanical Systems, 24(3), 592–598.
Song, Y. H., Han, C. H., Kim, M. W., Lee, J. O., & Yoon, J. B. (2012). An electrostatically actuated stacked-electrode MEMS relay with a levering and torsional spring for power applications. Journal of Microelectromechanical Systems, 21(5), 1209–1217.
Spencer, M., Chen, F., Wang, C. C., Nathanael, R., Fariborzi, H., Gupta, A., et al. (2011). Demonstration of integrated micro-electro-mechanical relay circuits for VLSI applications. IEEE Journal of Solid-State Circuits, 46(1), 308–320.
Stornelli, V. (2009). Low voltage low power fully differential buffer. Journal of Circuits, Systems, and Computers, 18(03), 497–502.
Tang, M., Liu, A., Agarwal, A., Zhang, Q., & Win, P. (2004). A new approach of lateral RF mems switch. Analog Integrated Circuits and Signal Processing, 40(2), 165–173.
Veendrick, H. J. (1984). Short-circuit dissipation of static CMOS circuitry and its impact on the design of buffer circuits. IEEE Journal of Solid-State Circuits, 19(4), 468–473.
Wong, J. E. (2000). Analysis, design, fabrication, and testing of a mems switch for power applications. PhD thesis, Massachusetts Institute of Technology.
Wright, J. A., & Tai, Y. C. (1998). Micro-miniature electromagnetic switches fabricated using MEMS technology. In Proceedings of the relay conference, National association of relay manufacturers, Vol. 46, pp. 13–21.
Yasoda, B., & Basha, S. K. (2013). Performance analysis of energy efficient and charge recovery adiabatic techniques for low power design. IOSR Journal of Engineering (IOSRJEN), 3(6), 14–21.
Yi, Z., Guo, J., Chen, Y., Zhang, H., Zhang, S., Xu, G., et al. (2016). Vertical, capacitive microelectromechanical switches produced via direct writing of copper wires. Microsystems & Nanoengineering, 2(16), 010.
Zhai, B., Blaauw, D., Sylvester, D., & Flautner, K. (2005). The limit of dynamic voltage scaling and insomniac dynamic voltage scaling. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 13(11), 1239–1252.
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Samaali, H., Najar, F. & Chaalane, A. Modeling and design of an ultra low-power NEMS relays: application to logic gate inverters. Analog Integr Circ Sig Process 104, 17–26 (2020). https://doi.org/10.1007/s10470-020-01658-1
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DOI: https://doi.org/10.1007/s10470-020-01658-1