Skip to main content
SpringerLink
Log in

Inertial effects on flow rate spectrum of diffuser micropumps

  • Published:
Biomedical Microdevices Aims and scope Submit manuscript

Abstract

This study develops a diffuser micropump and characterizes its output flow rates, such as the parabola shape on the frequency domain and the affecting factors. First, an equivalent circuit using electronic–hydraulic analogies was constructed. Flow rate analysis results were then compared to experimental results to verify the applicability of the circuit simulation. The operational frequency was 800 Hz for both cases and maximum flow rates were 0.078 and 0.075 μl/s for simulation and experimental results, respectively. Maximum flow rate difference between simulation and experiment was 3.7%. The circuit was then utilized to analyze inertial effects of transferred fluid and system components on output flow rates. This work also explained why the flow rate spectrum has a parabolic shape. Analysis results demonstrated that without inertial effects, micropump flow rates are linearly proportional to operational frequency; otherwise flow rate spectrum has parabolic shape. The natural frequency of the actuator-membrane structure was identified using the finite element method to verify whether this parameter affects flow rate characteristics. Experimental and simulation results demonstrated that the frequency of the maximum pumping flow rate was 800 Hz and the first mode natural frequency of actuator-membrane structure was 91.4 kHz, suggesting that the structure natural frequencies of the actuator-membrane structure do not play any role in micropump operations.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14

Similar content being viewed by others

References

  • A. Doll, M. Heinrichs, F. Goldschmidtboeing, H.-J. Schrag, U.T. Hopt, P. Woias, A high performance bidirectional micropump for a novel artificial sphincter system. Sens. Actuators A. 130–131, 445–453 (2006)

    Article  Google Scholar 

  • Y.-C. Hsu, S.-J. Lin, C.-C. Hou, Development of peristaltic antithrombogenic micropumps for in vitro and ex vivo blood transportation tests. Microsyst. Technol. 14(1), 31–41 (2007)

    Article  Google Scholar 

  • I. Izzo, D. Accoto, A. Menciassi, L. Schmitt, P. Dario, Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves. Sens. Actuators A. 133, 128–140 (2007)

    Article  Google Scholar 

  • S.-Y. Jeong, J. Thorud, D. Pence, J. Liburdy, Performance characteristics of a membrane driven variable flow rate micro-pump. Proceedings of the 3rd International Conference on Microchannels and Minichannels, 2005, pp. 281–286, (2005a)

  • O.C. Jeong, S.W. Park, S.S. Yang, J.J. Pak, Fabrication of a peristaltic PDMS micropump. Sens. Actuators A. 123–124, 453–458 (2005b)

    Google Scholar 

  • E. Morganti, I. Fuduli, A. Montefusco, M. Petasecca, G.U. Pignatel, SPICE modelling and design optimization of micropumps. Int. J. Environ. Anal. Chem. 85(9–11), 687–698 (2005)

    Article  Google Scholar 

  • R.E. Oosterbroek, Modeling, design and realization of microfluidic components. Ph.D. thesis, University of Twente, MESA Research Institute, (1999)

  • L.S. Pan, T.Y. Ng, X.H. Wu, H.P. Lee, Analysis of valveless micropumps with inertial affects. J. Micromechanics Microengineering. 13(3), 390–399 (2003)

    Article  Google Scholar 

  • T. Pan, E. Kai, M. Stay, V. Barocas, B. Ziaie, A magnetically driven PDMS peristaltic micropump. Proceedings of the 26th Annual International Conference of the IEEE EMBS San Francisco, CA, USA, September 1–5, (2004)

  • A. Ullmann, I. Fono, The Piezoelectric valve-less pump-improved dynamic model. Journal of Microelectromechanical Systems. 11(6), 655–664 (2002)

    Article  Google Scholar 

  • F.C.M. van de Pol, H.T.G. van Lintel, A thermopneumatic micropump based on micro-engineering techniques. Sens. Actuators A, Phys. 21, 198–202 (1990)

    Article  Google Scholar 

  • J. Xie, J. Shih, Y.-C. Tai, Integrated parylene electrostatic peristaltic pump. Proceedings of Micro TAS 2003 California, USA, October, 2003, pp. 865–868, (2003)

  • C. Yamahata, F. Lacharme, M.A.M. Gijs, Glass micropump using electromagnetic actuation. Microelectron. Eng. 78–79, 132–137 (2005)

    Article  Google Scholar 

  • K.-S. Yun, I.-J. Cho, J.-U. Bu, C.-J. Kim, E. Yoon, A surface-tension driven micropump for low-voltage and low-power operations. Journal of Microelectromechanical Systems. 11(5), 454–461 (2002)

    Article  Google Scholar 

  • Q. Zhao, D.-F. Cui, L. Wang, H.-N. Wang, C.-C. Liu, The study on the dynamic characteristic of the valveless piezoelectric micropump. Yadian Yu Shengguang/Piezoelectrics and Acoustooptics. 27(6), 631–633 (2005)

    Google Scholar 

Download references

Acknowledgement

The authors gratefully acknowledge the financial support provided to this study by the National Science Council of the Republic of China, Taiwan, under Contract No. NSC 96-2221-E-218-033. The authors would also like to thank National Nano Device Laboratories, Center for Micro/Nano Technology Research for their assistance in fabricating the micropumps used in this study.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, Southern Taiwan University, No. 1 Nan-Tai Street, Yung Kang City, 710, Tainan, Taiwan

    Yi-Chu Hsu & Ngoc-Bich Le

Authors
  1. Yi-Chu Hsu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ngoc-Bich Le
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Yi-Chu Hsu.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Hsu, YC., Le, NB. Inertial effects on flow rate spectrum of diffuser micropumps. Biomed Microdevices 10, 681–692 (2008). https://doi.org/10.1007/s10544-008-9179-2

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10544-008-9179-2

Keywords

Search

Navigation