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Mixing in Au/Ge system induced by Ar+ ion irradiation

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Abstract

Rutherford Backscattering Spectrometry (RBS) and Electrical Resistivity Measurements (ERM) were used to investigate the mixing of Au/Ge bilayer deposited onto glass substrate induced by Ar ions. Mixing was initiated by bombarding the sample with 400 keV 40Ar+ beam with a fluence up to 1.2 × 1017 ions/cm2 at a constant flux of 0.25 μA/cm2. To assist the evaluation of the experimental results, all spectra were simulated using “RUMP” computer code. RBS results indicated that ion beam mixing led to a formation of AuGe2 compound. The mixed region was noticed to increase with the gradual increase of Ar+ fluence. Results were also compared with current theoretical models used to describe the mixing process. The Bφrgesen thermal spike model was found to accurately predict the diffusion in Au/Ge interface. An increase in the electrical resistivity of the film was detected during Ar+ irradiation.

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References

  1. Riviere JP (1992) Nucl Inst and Meth B68:361

    Article  CAS  Google Scholar 

  2. Joseph B, Mohapatra S, Satpati B, Lenka HP, Kuiri PK, Mahapatra DP (2005) Nucl Inst and Meth B227:559

    Article  CAS  Google Scholar 

  3. Masoud NM, Arafah D-E, Becker KH (2002) Nucl. Inst. and Meth B198:64

    Article  Google Scholar 

  4. Masoud NM, Arafah D-E (1999) Phys Stat Sol (a) 172:155

    Article  CAS  Google Scholar 

  5. Arafah D-E, Masoud N, Mahmoud A (2002) Characterization of defects induced by 40Ar+ beam irradiation in thin films used for solar cell devices, International Symposium on utilization of accelerators, Sao Paulo, Brazil, (November 2001), International Atomic Energy Agency (IAEA) Publications

  6. Satpati B, Satyam PV, Som T, Dev BN (2004) Appl Phys A79:447

    Google Scholar 

  7. Liu BX, Jin O (1997) Phys. Stat. Sol. (a) 161:3

    Article  CAS  Google Scholar 

  8. Paine BM, Liu BX (1989) In: Itoh T (ed) Ion beam assisted film growth. Elsevier, Amsterdam

  9. Rossi F, Nastasi M (1991) J App Phys 69(3):1310

    Article  Google Scholar 

  10. Sigmund P, Grass-Marti A (1985) Nucl Inst and Meth 182/183:25

    Article  Google Scholar 

  11. Littmark U, Hofer WO (1980) Nucl Inst and Meth 168:329

    Article  CAS  Google Scholar 

  12. Ibe E (1989) Nucl Inst and Meth B39:148

    Article  CAS  Google Scholar 

  13. Myers SM (1980) Nucl Inst and Meth 168:265

    Article  CAS  Google Scholar 

  14. Bhattacharya RS, Rai AK, Rashid H, Ezis A, Pronko PP (1985) In: Current MI, Sadana DK (eds) Proceedings of the International Society for Optical Engineering, vol 530, SPIE, Washington

  15. Bhattacharya RS, Rai AK, Ezis A, Rashid MH, Pronko PP (1985) J Vac Sci Technol. A3:2316

    Google Scholar 

  16. Som T, Ayyub P, Kabiraj D, Kulkarni N, Kulkarni VN, Avasthi DK (2003) J Appl Phys 93:903

    Google Scholar 

  17. Som T, Satpati B, Satyam PV, Ayyub P, Kabiraj D (2003) Nucl Inst Meth B212:151

    Google Scholar 

  18. Ziegler JF, Biersack JP, Littmark N (1985) The stopping and ranges of ions in solids. Pergamon Press, New York

    Google Scholar 

  19. Doolittle LR (1985) Nucl Inst Meth B9:344

    CAS  Google Scholar 

  20. Chu WK, Mayer JW, Nicolet M-A (1978) Backscattering spectrometry. Academic Press, London

    Google Scholar 

  21. Knapp JA, Barbour JC, Doyyle BL (1992) J Vac Sci Technol A10(4):2685

    Google Scholar 

  22. Nawash J (1997) Ion beam mixing of some germanide systems, M.Sc. Thesis, Uneversity of Jordan, Amman, Jordan

  23. Masoud N (1997) Ion beam mixing of Ag/Si system, M.Sc. Thesis, University of Jordan, Amman, Jordan

  24. Al-Saleh KA, Saleh NS (1997) Phys Stat Sol (a) 161:407

    Article  CAS  Google Scholar 

  25. Weber T, Lieb K-P (1993) J Appl Phys 37(7):3499

    Article  Google Scholar 

  26. Dhar S, Kulkarni VN (1998) Thin Solid Films 333:20

    Article  CAS  Google Scholar 

  27. Lau SS, Tsaur BY, von Allmen M, Mayer JW (1981) Nucl Instr Meth 182/183:97

    Article  Google Scholar 

  28. Auner GW, Cheng YT, Alkais MH, Padnamabahn KR (1991) Appl Phys Lett 58:586

    Article  CAS  Google Scholar 

  29. Cheng Y-T (1990) Mater Sci Rep 5:45

    Article  Google Scholar 

  30. Bolse W (1994) Mater Sci Eng R 12:53

    Article  Google Scholar 

  31. Jaouen C, Riviere JP, Bellara A, Delafond J (1984) Nucl Inst Meth B7/8:591

    Google Scholar 

  32. Johnson WL, Cheng YT, Van-Rossum M, Nicolet M-A (1985) Nucl Inst Meth B7/8:657

    Google Scholar 

  33. BØrgesen P, Lilienfeld DA, Johnson HH (1990) Appl Phys Lett 57(14):1407

    Article  Google Scholar 

  34. BØrgesen P, Lilienfeld DA, Msaad H (1991) Nucl Inst Meth B59/60:563

    Google Scholar 

  35. Saleh NS, Al-Saleh KA, Saleh AA (1990) Nucl Inst Meth B47:263

    CAS  Google Scholar 

Download references

Acknowledgement

We are grateful to Messrs. A. Khader, S. Kharabshah, A. Amre and S. Abdul-Rahman at the JOVAC facilities. We also would like to thank Frank D’Agosta for his help during the revision of the manuscript.

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Author notes

  1. J. M. Nawash

    Present address: Material Research Center, Washington State University, Pullman, WA, USA

  2. N. M. Masoud

    Present address: UV Solutions Inc., Newark, NJ, USA

Authors and Affiliations

  1. Physics Department, University of Jordan, Amman, Jordan

    J. M. Nawash, N. M. Masoud, K. A. Al-Saleh & N. S. Saleh

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  1. J. M. Nawash
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  2. N. M. Masoud
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  3. K. A. Al-Saleh
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  4. N. S. Saleh
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Correspondence to N. M. Masoud.

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Nawash, J.M., Masoud, N.M., Al-Saleh, K.A. et al. Mixing in Au/Ge system induced by Ar+ ion irradiation. J Mater Sci 42, 7488–7493 (2007). https://doi.org/10.1007/s10853-006-1463-z

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  • DOI: https://doi.org/10.1007/s10853-006-1463-z

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