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Nanosecond laser surface processing of AlN ceramics

  • Ceramics
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Abstract

To study the formation mechanism of a conductive layer in a laser-processed AlN ceramic plate, nanosecond laser treatment on an AlN ceramic was performed to generate an Al layer, which created conductivity on the surface. Changes in the resistance for different energy densities, pulse durations, line spacings and scanning speeds were studied by means of XPS and scanning electron microscopy. The results show that the resistance is inversely proportional to the duration of the pulse in the case of low energy density or low scanning speed. At a higher energy density or a higher scanning speed, the resistance is proportional to the duration of the pulse. The variation in the resistance as a function of line spacing is related to the energy density. As the energy density increases, the resistance value decreases slowly at first and then maintains an upward trend. The resistance is proportional to the scanning speed.

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Acknowledgements

This work was supported by Hubei Provincial Department of Education, China (Grant Nos. D20181401 and T201405).

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Authors and Affiliations

  1. Key Lab of Modern Manufacture Quality Engineering, Wuhan, People’s Republic of China

    Qibiao Yang

  2. Laser Group, School of Mechanical Engineering, Hubei University of Technology, Wuhan, People’s Republic of China

    Qibiao Yang, Yang Chen, Zhihuai Lv, Lie Chen, Deyuan Lou, Zhong Zheng, Jian Cheng & Dun Liu

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  1. Qibiao Yang
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Correspondence to Dun Liu.

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Yang, Q., Chen, Y., Lv, Z. et al. Nanosecond laser surface processing of AlN ceramics. J Mater Sci 54, 13874–13882 (2019). https://doi.org/10.1007/s10853-019-03888-9

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  • DOI: https://doi.org/10.1007/s10853-019-03888-9

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