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Acetic acid sensing of Mg-doped ZnO thin films fabricated by the sol–gel method

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Abstract

Acetic acid vapor thin film gas sensor was developed by synthesizing Mg-doped ZnO nanoparticles using a low cost and facile sol–gel route and were characterized using field emission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, Fourier transform infrared spectroscopy and photoluminescence analysis. Morphological characterizations showed the formation of well-defined and highly crystalline ZnO nanoparticles on Si(100)/SiO2 substrate. Gas sensing characterization of dip coated Mg-doped ZnO thin films were performed in temperature range of 150–400 °C at different acetic acid vapor concentrations. At 300 °C, the sensitivity for pure ZnO, Zn0.98Mg0.02O and Zn0.94Mg0.06O samples at concentration of 200 ppm of acetic acid were 124, 78 and 67%, respectively. The highest sensitivity for Zn0.96Mg0.04O sample was 136% at the same vapor concentration and temperature. It showed a fast response time and recovery time (145 and 110 s, respectively).

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Authors and Affiliations

  1. Department of Electrical Engineering, Arak Branch, Islamic Azad University, Arak, Iran

    Vahid Khorramshahi

  2. Department of Electrical Engineering, South Tehran Branch, Islamic Azad University, Tehran, Iran

    Javad Karamdel

  3. Department of Physics, Masjed-Soleiman Branch, Islamic Azad University (I.A.U.), Masjed-Soleiman, Iran

    Ramin Yousefi

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Khorramshahi, V., Karamdel, J. & Yousefi, R. Acetic acid sensing of Mg-doped ZnO thin films fabricated by the sol–gel method. J Mater Sci: Mater Electron 29, 14679–14688 (2018). https://doi.org/10.1007/s10854-018-9604-0

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