Abstract
Preparation and property optimization of silver (Ag)-embedded fluorine-doped tin oxide (FTO) films were achieved based on laser etching, sputtering Ag layers, furnace annealing, sputtering aluminum-doped zinc oxide (AZO) layers and laser annealing. Specifically, a nanosecond pulsed laser (λ = 532 nm) was used to etch grooves on FTO films before sputtering 5-nm-thick Ag layers, with an aim for enabling the Ag nanoparticles from the furnace-annealed Ag layers to be intensively embedded in the grooves under the thermal-induced dewetting effect. The optimal laser fluence for laser etching and temperature for furnace annealing were found to be 0.4 J/cm2 and 300 °C, respectively. The as-obtained Ag-embedded FTO film exhibited significantly improved optical and electrical properties, being attributed mainly to the decreased coverage area of the Ag nanoparticles on the FTO film surface and the furnace annealing effect. The subsequently sputtered 10-nm-thick AZO layer suppressed the internal light reflection from the Ag nanoparticles, and laser annealing further facilitated grain growth in the film. Therefore, the resulting film had the best comprehensive property with the highest figure of merit of 20.94 × 10–3 Ω–1, which was much higher than that of the original FTO film (7.65 × 10–3 Ω–1). This work may provide a new combined processing method for high-performance transparent conductive films.
Similar content being viewed by others
References
C. Ma, X. Lu, B. Xu, F. Zhao, X. An, B. Li, L. Sun, J. Jiang, Y. Chen, J. Chu, Effects of sputtering parameters on photoelectric properties of AZO film for CZTS solar cell. J. Alloys Compd. 774, 201–209 (2019)
J.N. Alexander, N. Sun, R. Sun, H. Efstathiadis, P. Haldar, Development and characterization of transparent and conductive InZnO films by magnetron sputtering at room temperature. J. Alloys Compd. 633, 157–164 (2015)
F. Mei, T. Yuan, A. Chu, R. Li, Comparative study on the microstructure and properties of 10 wt%- and 35 wt%-tin doped indium oxide materials. J. Eur. Ceram. Soc. 39, 4806–4816 (2019)
R. Li, S. Dai, Y. Ma, L. Tian, Q. Wang, D. Zhou, X. Zhang, High-performance transparent Li-doped indium-tin-zinc-oxide thin film transistor fabricated by radio frequency magnetron sputtering method. Mater. Lett. 230, 132–134 (2018)
W. Zhang, J. Xiong, L. Liu, X. Zhang, H. Gu, Influence of annealing temperature on structural, optical and electrical properties of AZO/Pd/AZO films. Sol. Energy Mater. Sol. Cells 153, 52–60 (2016)
B.J. Li, L.J. Huang, N.F. Ren, X. Kong, Y.L. Cai, J.L. Zhang, Superhydrophobic and anti-reflective ZnO nanorod-coated FTO transparent conductive thin films prepared by a three-step method. J. Alloys Compd. 674, 368–375 (2016)
L.J. Huang, B.J. Li, H.D. Cao, W. Zu, N.F. Ren, H. Ding, Influence of annealing temperature on formation and photoelectric properties of AZO nanosheet-coated FTO-based films. J. Mater. Sci. - Mater. Electron. 28, 4706–4712 (2017)
K.C. Lee, S.J. Lin, C.H. Lin, C.S. Tsai, Y.J. Lu, Size effect of Ag nanoparticles on surface plasmon resonance. Surf. Coat. Technol. 202, 5339–5342 (2008)
L.J. Huang, G.M. Zhang, Y. Zhang, B.J. Li, N.F. Ren, L. Zhao, Y.L. Wang, Preparation and photoelectric properties of patterned Ag nanoparticles on FTO/glass substrate by laser etching and driving layer strategy. Acta Metall. Sin. Engl. Lett. (2020). https://doi.org/10.1007/s40195-020-01169-y
M. Li, Y. Wang, Y. Wang, X. Wei, AZO/Ag/AZO transparent flexible electrodes on mica substrates for high temperature application. Ceram. Int. 43, 15442–15446 (2017)
D. Zhang, Y. Tang, F. Jiang, Z. Han, J. Chen, Electrodeposition of silver nanoparticle arrays on transparent conductive oxides. Appl. Surf. Sci. 369, 178–182 (2016)
C.F. Ding, W.T. Hsiao, H.T. Young, Evaluation of structural properties of AZO conductive films modification using low-temperature ultraviolet laser annealing. Ceram. Int. 45, 16387–16398 (2019)
L. Dejam, S.M. Elahi, H.H. Nazari, H. Elahi, S. Solaymani, A. Ghaderi, Structural and optical characterization of ZnO and AZO thin films: the influence of post-annealing. J. Mater. Sci. - Mater. Electron. 27, 685–696 (2016)
C.T. Angelis, C.A. Dimitriadis, M. Miyasaka, F.V. Farmakis, G. Kamarinos, J. Brini, J. Stoemenos, Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors. J. Appl. Phys. 86, 4600–4606 (1999)
Y. Zhao, Y. Jiang, Effect of KrF excimer laser irradiation on the properties of ZnO thin films. J. Appl. Phys. 103, 114903 (2008)
T. Shimogaki, T. Ofuji, N. Tetsuyama, K. Okazaki, M. Higashihata, D. Nakamura, H. Ikenoue, T. Asano, T. Okada, Effect of laser annealing using high repetition rate pulsed laser on optical properties of phosphorus-ion-implanted ZnO nanorods. Appl. Phys. A. 114, 625–629 (2014)
S.O. El hamali, W.M. Cranton, N. Kalfagiannis, X. Hou, R. Ranson, D.C. Koutsogeorgis, Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing. Opt. Lasers Eng. 80, 45–51 (2016)
L.J. Huang, B.J. Li, N.F. Ren, Enhancing optical and electrical properties of Al-doped ZnO coated polyethylene terephthalate substrates by laser annealing using overlap rate controlling strategy. Ceram. Int. 42, 7246–7252 (2016)
N.F. Ren, H.D. Cao, L.J. Huang, B.J. Li, W. Zu, Ultrasonic-vibration-assisted laser annealing on photoelectric properties of FTO thin films. J. Inorg. Mater. Chin. Ed. 32, 1083–1088 (2017)
Y.L. Wang, B.J. Li, S.S. Li, H. Li, L.J. Huang, N.F. Ren, Parameter optimization in femtosecond pulsed laser etching of fluorine-doped tin oxide films. Opt. Laser Technol. 116, 162–170 (2019)
A.N. Samant, N.B. Dahotre, Differences in physical phenomena governing laser machining of structural ceramics. Ceram. Int. 35, 2093–2097 (2009)
J. Hoffman, The effect of recoil pressure in the ablation of polycrystalline graphite by a nanosecond laser pulse. J. Phys. D: Appl. Phys. 48, 235201 (2015)
C. Tang, K.Q. Le, C.H. Wong, Physics of humping formation in laser powder bed fusion. Int. J. Heat Mass Transfer 149, 119172 (2020)
S.-F. Tseng, W.-T. Hsiao, K.-C. Huang, D. Chiang, The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates. Appl. Surf. Sci. 257, 8813–8819 (2011)
J. Berger, T. Roch, S. Correia, J. Eberhardt, A.F. Lasagni, Controlling the optical performance of transparent conducting oxides using direct laser interference patterning. Thin Solid Films 612, 342–349 (2016)
X.Q. Wang, L.L. Fan, Z.S. Wang, J.B. Gong, J.W. Hou, R.C. Dai, Z.P. Wang, C.E. Zou, Z.M. Zhang, Exact interband transition energies of VO2 films. Thin Solid Films 645, 160–165 (2018)
B.J. Li, G.Y. Yang, L.J. Huang, W. Zu, N.F. Ren, Performance optimization of SnO2: F thin films under quasi-vacuum laser annealing with covering a transparent PET sheet: a study using processing map. Appl. Surf. Sci. 509, 145334 (2020)
B.J. Li, H. Li, L.J. Huang, H.D. Cao, W. Zu, N.F. Ren, H. Ding, X. Kong, J.L. Zhang, Performance optimization of fluorine-doped tin oxide thin films by introducing ultrasonic vibration during laser annealing. Ceram. Int. 43, 7329–7337 (2017)
H.B. Lee, W.Y. Jin, M.M. Ovhal, N. Kumar, J.W. Kang, Flexible transparent conducting electrodes based on metal meshes for organic optoelectronic device applications: A review. J. Mater. Chem. C 7, 1087–1110 (2019)
K.-L. Wang, Y.-Q. Xin, J.-F. Zhao, S.-M. Song, S.-C. Chen, Y.-B. Lu, H. Sun, High transmittance in IR region of conductive ITO/AZO multilayers deposited by RF magnetron sputtering. Ceram. Int. 44, 6769–6774 (2018)
Y.Y. Wang, B.J. Li, L.J. Huang, H.D. Cao, L. Zhao, N.F. Ren, Effect of Ag layer thickness and scan line spacing during laser annealing of Ag/F-doped SnO2 bilayer composite thin films under ultrasonic vibration assistance. J. Alloys Compd. 829, 154504 (2020)
Y. Azizian-Kalandaragh, S. Nouhi, M. Amiri, Effect of post-annealing treatment on the wetting, optical and structural properties of Ag/Indium tin oxide thin films prepared by electron beam evaporation technique. Mater. Express 5, 137–145 (2015)
J. Jin, C. Liu, Z. Yang, L. Wang, The influence of AZO films on morphology and surface plasmon resonance properties of Ag particles. Surf. Coat. Technol. 363, 135–141 (2019)
A. Kumar, S. Mukherjee, S. Sahare, R.K. Choubey, Influence of deposition time on the properties of ZnS/p-Si heterostructures. Mater. Sci. Semicond. Process. 122, 105471 (2021)
R.K. Choubey, D. Desai, S.N. Kale, S. Kumar, Effect of annealing treatment and deposition temperature on CdS thin films for CIGS solar cells applications. J. Mater. Sci. Mater. Electron. 27, 7890–7898 (2016)
A.S.M. Maria, N. Kumaresan, K. Ramamurthi, K. Sethuraman, B.S. Moorthy, B.R. Ramesh, V. Ganesh, Influence of heat treatment on the properties of hydrothermally grown 3D/1D TiO2 hierarchical hybrid microarchitectures over TiO2 seeded FTO substrates. Appl. Surf. Sci. 449, 122–131 (2018)
T.-C. Lin, W.-C. Huang, F.-C. Tsai, Hydrogen plasma effect toward the AZO/CuCr/AZO transparent conductive electrode. Microelectron. Eng. 167, 85–89 (2017)
L.J. Huang, G.M. Zhang, H. Li, B.J. Li, Y.Y. Wang, N.F. Ren, Selective laser ablation and patterning on Ag thin films with width and depth control. J. Mater. Sci. - Mater. Electron. 31, 4943–4955 (2020)
A. Kumar, M. Kumar, V. Bhatt, D. Kim, S. Mukherjee, J.-H. Yun, R.K. Choubey, ZnS microspheres-based photoconductor for UV light-sensing applications. Chem. Phys. Lett. 763, 138162 (2021)
N.M. Ahmed, F.A. Sabah, H.I. Abdulgafour, A. Alsadig, A. Sulieman, M. Alkhoaryef, The effect of post annealing temperature on grain size of indium-tin-oxide for optical and electrical properties improvement. Results Phys. 13, 102159 (2019)
S.G. Deshmukh, V. Kheraj, A.K. Panchal, Effect of annealing on the properties of Cu3BiS3 thin films deposited via chemical bath deposition. Mater. Today: Proc. 5, 10712–10716 (2018)
X. Liu, W. Bi, Z. Liu, Influence of post-annealing on the properties of Sc-doped ZnO transparent conductive films deposited by radio-frequency sputtering. Appl. Surf. Sci. 255, 7942–7945 (2009)
B.J. Li, Y.Y. Wang, L.J. Huang, H.D. Cao, Q.H. Wang, H.T. Ding, N.F. Ren, Influences of ultrasonic vibration on morphology and photoelectric properties of F-doped SnO2 thin films during laser annealing. Appl. Surf. Sci. 458, 940–948 (2018)
Y. Jiang, X. Li, W. Jiang, Q. Wan, X. Gan, Y. Zhao, C. Hua, X. Li, J. Zhang, Thickness effect in laser shock processing for test specimens with a small hole under smaller laser power density. Opt. Laser Technol. 114, 127–134 (2019)
T.Y. Wang, B.J. Li, N.F. Ren, L.J. Huang, L. Huang, Influence of Al/Cu thickness ratio and deposition sequence on photoelectric property of ZnO/Al/Cu/ZnO multilayer film on PET substrate prepared by RF magnetron sputtering. Mater. Sci. Semicond. Process. 91, 73–80 (2019)
D. Scorticati, A. Illiberi, T.C. Bor, S.W.H. Eijt, T. Schut, G.R.B.E. Romer, M. Klein Gunnewiek, A.T.M. Lenferink, B.J. Kniknie, R. Mary Joy, M.S. Dorenkamper, D.F. de Lange, C. Otto, D. Borsa, W.J. Soppe, A.J. Huis in’t Veld, Thermal annealing using ultra-short laser pulses to improve the electrical properties of Al:ZnO thin films. Acta Mater. 98, 327–335 (2015)
R.C. Chang, T.C. Li, C.W. Lin, Influence of various thickness metallic interlayers on opto-electric and mechanical properties of AZO thin films on PET substrates. Appl. Surf. Sci. 258, 3732–3737 (2012)
D. Gaspar, A.C. Pimentel, M.J. Mendes, T. Mateus, B.P. Falcão, J. Soares, A. Araújo, A. Vicente, S.A. Filonovich, H. Águas, R. Martins, I. Ferreira, Ag and Sn nanoparticles to enhance the near-infrared absorbance of a-Si: H thin films. Plasmonics 9, 1015–1023 (2014)
A. Kumar, D. Pednekar, S. Mukherjee, R.K. Choubey, Effect of deposition time and complexing agents on Hierarchical nanoflakes CdS structured thin films. J. Mater. Sci. - Mater. Electron. 31, 17055–17066 (2020)
Q. Wang, B. Li, F. Toor, H. Ding, Novel laser-based metasurface fabrication process for transparent conducting surfaces. J. Laser Appl. 31, 022505 (2019)
R. Chen, Z. Hu, Y. Ye, J. Zhang, Z. Shi, Y. Hua, An anti-reflective 1D rectangle grating on GaAs solar cell using one-step femtosecond laser fabrication. Opt. Lasers Eng. 93, 109–113 (2017)
X. Chen, B. Jia, J.K. Saha, B. Cai, N. Stokes, Q. Qiao, Y. Wang, Z. Shi, M. Gu, Broadband enhancement in thin-film amorphous silicon solar cells enabled by nucleated silver nanoparticles. Nano Lett. 12, 2187–2192 (2012)
C.P. Burrows, W.L. Barnes, Large spectral extinction due to overlap of dipolar and quadrupolar plasmonic modes of metallic nanoparticles in arrays. Opt. Express 18, 3187–3198 (2010)
B.J. Li, G.Y. Yang, L.J. Huang, T.Y. Wang, N.F. Ren, Effects of BN layer on photoelectric properties and stability of flexible Al/Cu/ZnO multilayer thin film. Ceram. Int. 46, 14686–14696 (2020)
C.-T. Wu, Y.-R. Ho, D.-Z. Huang, J.-J. Huang, AZO/silver nanowire stacked films deposited by RF magnetron sputtering for transparent antenna. Surf. Coat. Technol. 360, 95–102 (2019)
B.J. Li, G.Y. Yang, L.J. Huang, W. Zu, H. Li, Y.L. Wang, S.S. Li, N.F. Ren, Surface morphology and photoelectric properties of FTO ceramic thin films under a simple transparent cover-assisted laser annealing. Mater. Res. Bull. 108, 151–155 (2018)
B.J. Li, Y.Y. Wang, L.J. Huang, H.D. Cao, Q.H. Wang, N.F. Ren, H.T. Ding, Ultrasonic-vibration-assisted laser annealing of fluorine-doped tin oxide thin films for improving optical and electrical properties: Overlapping rate optimization. Ceram. Int. 44, 22225–22234 (2018)
S. Kumar, H.C. Jeon, T.W. Kang, R. Seth, S. Panwar, S.K. Shinde, D.P. Waghmode, R.G. Saratale, R.K. Choubey, Variation in chemical bath pH and the corresponding precursor concentration for optimizing the optical, structural and morphological properties of ZnO thin films. J. Mater. Sci. Mater. Electron. 30, 17747–17758 (2019)
Acknowledgements
This work was financially supported by the National Natural Science Foundation of China (Grant nos. 51805220 and 61405078). The authors would like to thank the support of the Young Backbone Teacher Cultivating Project of Jiangsu University (Reference no. 5521220008).
Author information
Authors and Affiliations
Corresponding authors
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
About this article
Cite this article
Ren, Nf., Wang, Wz., Li, Bj. et al. Preparation and property optimization of silver-embedded FTO transparent conductive thin films by laser etching and coating AZO layer. J Mater Sci: Mater Electron 32, 10644–10661 (2021). https://doi.org/10.1007/s10854-021-05720-0
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10854-021-05720-0