Abstract
The deposition of a protective film to increase the hardness of an organic photoconductor (OPC) surface is an effective method of lengthening the lifetime of the OPC. In this work, diamond-like carbon (DLC) protective films were deposited onto OPC samples by the electron cyclotron resonance (ECR)-microwave plasma chemical vapor deposition (MPCVD) method with low substrate temperature. The DLC films were deposited with optimized deposition conditions and exhibited high transmissivity and high electrical resistivity. The films caused a remarkable increase in the hardness of the OPC surface, by a factor of 2.5∼5.4. The acceptance voltage, dark decay rate, photodischarge rate, and contrast potential of the OPC protected by DLC film were improved. These results show DLC is a suitable protective film for OPC.
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References
Arthur S. Diamond, Handbook of Imaging Materials, (Marcel Dekker Inc., 1991), p. 393.
Shigenori Otsuka, SPIE Proc. 1670, (SPIE, 1992), p. 128.
X.S. Miao, Y.C. Chan, C.K.H. Wong, D.P. Webb, Y.W. Lam, K.M. Leung and D.S. Chiu, J. Electron. Mater. 26, 387 (1997).
M.C. Costello, D.A. Tossell, D.M. Reece and C.J. Brierley, Diamond and Related Mater. 3, 1137 (1994).
M. Alaluf, J. Appelbaum, L. Klibanov, D. Bringker, D. Scheiman and N. Croitoru, Thin Solid Films 256, 1 (1995).
A. Grill, V. Patel and S. Cohen, Diamond and Related Mater. 3, 281 (1994).
Y. Muranaka, H. Yamashita and H. Miyadera, Diamond and Related Mater. 3, 313 (1994).
C.K.H. Wong, Y.C. Chan, Y.W. Lam, D.P. Webb, K.M. Leung and D. Chiu, J. Electron. Mater. 25, 1451 (1996).
B. Jonsson and S. Hogmark, Thin Solid Films 114, 257 (1984).
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Chan, Y.C., Miao, X.S., He, X.M. et al. Diamond-like carbon protective films for organic photoconductors. J. Electron. Mater. 27, 42–44 (1998). https://doi.org/10.1007/s11664-998-0335-5
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DOI: https://doi.org/10.1007/s11664-998-0335-5