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A high precision profilometer based on vertical scanning microscopic interferometry

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Journal of Shanghai University (English Edition)

Abstract

A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry (VSMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems (MEMS), etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.

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Authors and Affiliations

  1. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, 430074, P. R. China

    Rong Dai  (戴 蓉), Tie-bang Xie  (谢铁邦) & Su-ping Chang  (常素萍)

  2. School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, 430070, P. R. China

    Rong Dai  (戴 蓉) & Wen Gong  (龚 文)

Authors
  1. Rong Dai  (戴 蓉)
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  2. Tie-bang Xie  (谢铁邦)
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  3. Wen Gong  (龚 文)
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  4. Su-ping Chang  (常素萍)
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Corresponding author

Correspondence to Rong Dai  (戴 蓉).

Additional information

Project supported by the National Natural Science Foundation of China (Grant No.50175037)

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Dai, R., Xie, Tb., Gong, W. et al. A high precision profilometer based on vertical scanning microscopic interferometry. J. Shanghai Univ.(Engl. Ed.) 12, 255–260 (2008). https://doi.org/10.1007/s11741-008-0312-2

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  • DOI: https://doi.org/10.1007/s11741-008-0312-2

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