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Fabrication of Silicone Rubber-Based Biochip for Disinfection Under Deep-UV Light by ArF Excimer Laser-Induced Photodissociation

  • Original Article - Electronics, Magnetics and Photonics
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Abstract

A silicone rubber-based biochip for disinfection under deep-UV light exposure was successfully fabricated by an ArF excimer laser. To fabricate the biochip, periodic micro-swelling structure of silicone rubber was photochemically formed by the ArF excimer laser-induced photodissociation of Si–O bonds of silicone rubber. It was found that the growth rate of the micro-swelling structure could be controlled by varying the laser pulse repetition rate; a slow growth of roughly 100 ms and longer per laser pulse was recognized. In addition, no change of each the micro-swelling height formed at various laser pulse repetition rates was also found in the range of 300–18,000 of laser pulse number. Using such the wide processing window, moreover, the periodic micro-swelling structure could be modified into photoluminescent property by long irradiation of ArF excimer laser, while maintaining the micro-swelling height. Blue photoluminescence from the modified micro-swelling structure was observed under a deep-UV light exposure. Thus, each the periodic micro-swelling structure with various desired heights could be bonded to a flat plate of fused silica glass to have equal gaps. A small amount of solution could be confined in the equal gap to disinfect virus/bacteria in the solution under deep-UV light for analytical application.

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Acknowledgements

We thank Mr. Misaki Yokoyama for experiment assistance. This work was supported by JSPS KAKENHI Grant Number JP18K04790.

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Authors and Affiliations

  1. Department of Electrical and Electronic Engineering, National Defense Academy, Yokosuka, Kanagawa, 239-8686, Japan

    Masayuki Okoshi & Tsuyoshi Yoshida

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  1. Masayuki Okoshi
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  2. Tsuyoshi Yoshida
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Correspondence to Masayuki Okoshi.

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Okoshi, M., Yoshida, T. Fabrication of Silicone Rubber-Based Biochip for Disinfection Under Deep-UV Light by ArF Excimer Laser-Induced Photodissociation. Electron. Mater. Lett. 17, 68–73 (2021). https://doi.org/10.1007/s13391-020-00261-w

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  • DOI: https://doi.org/10.1007/s13391-020-00261-w

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