Skip to main content
SpringerLink
Log in

Thin film deposition from dual ion beam sputtering system

  • S.I. : Visvesvaraya
  • Published:
CSI Transactions on ICT Aims and scope Submit manuscript

Abstract

In this report, we study different device applications which utilizes oxide layers grown by dual ion beam sputtering (DIBS) system. DIBS system is noteworthy since it produces high-quality thin films with reasonably better compositional stoichiometry, small surface roughness and good adhesion to the substrate even for films grown at room temperature. DIBS system parameters affect the oxide and non-oxide layer in a very significant manner and control of these parameters allows for fine-tuning the as-grown thin films specialize for specific applications.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. Pandey SK, Pandey SK, Awasthi V, Kumar A, Deshpande UP, Gupta M et al (2014) Influence of annealing temperature on ZnO thin films grown by dual ion beam sputtering. Bull Mater Sci 37:983–989

    Article  Google Scholar 

  2. Pandey SK, Pandey SK, Deshpande UP, AwasthiV, Kumar A, Gupta M, Mukherjee S (2013) Effect of oxygen partial pressure on the behavior of dual ion beam sputtered ZnO thin films. Semicond Sci Technol 28:085014

    Article  Google Scholar 

  3. Kumar A, Mukherjee S, Kranti A (2018) Effects of bulk-defects and metal/bulk interface anomalies in a forming-free double-barrier memristor. J Phys D Appl Phys 51:405601

    Article  Google Scholar 

  4. Garg V, Sengar BS, Awasthi V, Kumar A, Singh R, Kumar S et al (2018) Investigation of dual-ion beam sputter-instigated plasmon generation in TCOs: a case study of GZO. ACS Appl Mater Interfaces 10:5464–5474

    Article  Google Scholar 

  5. Bhardwaj Ritesh, Sharma Pankaj, Singh Rohit, Gupta Mukul, Mukherjee Shaibal (2018) High responsivity MgxZn1–xO based ultraviolet photodetector fabricated by dual ion beam sputtering. IEEE Sens J 18(7):2744–2750

    Article  Google Scholar 

  6. Bhardwaj Ritesh, Sharma Pankaj, Singh Rohit, Mukherjee Shaibal (2017) Sb-doped p-MgZnO/n-Si heterojunction UV photodetector fabricated by dual ion beam sputtering. IEEE Photon Technol Lett 29(14):1215–1218

    Article  Google Scholar 

  7. Sharma PA, Mandal B, Biswas A, Manna MK, Maiti S, Das AK, Mukherjee S (2017) Synergetic accrual of lamellar nano-hybrids for band-selective photodetection. J Phys Chem C 121(26):14037–14044

    Article  Google Scholar 

  8. Bhardwaj S, Mukherjee S (2018) Nanoscale UV photodetectors based on ZnO and alloyed ZnO. Reference Module in Materials Science and Materials Engineering. Accepted March 2018

  9. Awasthi V, Pandey SK, Kumar S, Mukherjee C, Gupta M, Mukherjee S (2015) Evaluation of the band alignment and valence plasmonic features of a DIBS grown Ga-doped Mg0.05Zn0.95O/CIGSe heterojunction by photoelectron spectroscopy. J Phys D Appl Phys 48(48):485305

    Article  Google Scholar 

  10. Das M, Kumar A, Singh R, Htay MT, Mukherjee S (2018) Realization of synaptic learning and memory functions in Y2O3 based memristive device fabricated by dual ion beam sputtering. Nanotechnology 29(5):055203

    Article  Google Scholar 

  11. Das M, Kumar A, Mandal B, Htay MT, Mukherjee S (2018) Impact of Schottky junctions in the transformation of switching modes in amorphous Y2O3-based memristive system. J Phys D Appl Phys 51(31):315102

    Article  Google Scholar 

  12. Das M, Kumar A, Kumar S, Mandal B, Khan MA, Mukherjee S (2018) Effect of surface variations on the performance of yttria based memristive system. IEEE Electron Device Lett 39(12):1852–1855

    Article  Google Scholar 

  13. Singh R, Sharma P, Khan MA, Garg V, Awasthi V, Kranti A, Mukherjee S (2016) Investigation of barrier inhomogeneities and interface state density in Au/MgZnO: Ga Schottky contact. J Phys D Appl Phys 49(44):445303

    Article  Google Scholar 

  14. Khan MA, Singh R, Bhardwaj R, Kumar A, Das AK, Misra P, Kranti A, Mukherjee S (2018) Enhanced sheet charge density in DIBS grown CdO alloyed ZnO buffer based heterostructure. IEEE Electron Device Lett 39(6):827–830

    Article  Google Scholar 

  15. Chin H-A, Cheng I-C, Huang C-I, Wu Y-R, Lu W-S, Lee W-L, Chen JZ, Chiu K-C, Lin T-S (2010) Two dimensional electron gases in polycrystalline MgZnO/ZnO heterostructures grown by rf-sputtering process. J Appl Phys 108(5):054503

    Article  Google Scholar 

  16. Im K-S, Ha J-B, Kim K-W, Lee J-S, Kim D-S, Hahm S-H, Lee J-H (2010) Normally off GaN MOSFET based on AlGaN/GaN heterostructure with extremely high 2DEG density grown on silicon substrate. IEEE Electron Device Lett 31(3):192–194

    Article  Google Scholar 

  17. Lin B, Tsui D, Paalanen M, Gossard A (1984) Mobility of the two-dimensional electron gas in GaAs-AlxGa1 − xAs heterostructures. Appl Phys Lett 45(6):695–697

    Article  Google Scholar 

  18. Garg Vivek, Sengar Brajendra S, Kumar Amitesh, Siddharth Gaurav, Kumar Shailendra, Mukherjee Shaibal (2019) Investigation of valence plasmon excitations in GMZO thin film and their suitability for plasmon-enhanced buffer-less solar cells. Sol Energy 178:114–124

    Article  Google Scholar 

  19. Garg V, Sengar BS, Awasthi V, Kumar A, Singh R, Kumar S, Mukherjee C, Atuchin V, Mukherjee S (2018) Investigation of dual-ion beam sputter-instigated plasmon generation in TCOs: a case study of GZO. ACS Appl Mater Interfaces 10(6):5464–5474

    Article  Google Scholar 

  20. Kumar A, Das M, Garg V, Sengar BS, Htay MT, Kumar S, Kranti A, Mukherjee S (2017) Forming-free high-endurance Al/ZnO/Al memristor fabricated by dual ion beam sputtering. Appl Phys Lett 110(25):253509

    Article  Google Scholar 

  21. Modi A, Koratkar N, Lass E, Wei B, Ajayan PM (2003) Miniaturized gas ionization sensors using carbon nanotubes. Nature 424:171–174

    Article  Google Scholar 

  22. Park WI, Yi G-C, Kim JW, Park SM (2003) Schottky nanocontacts on ZnO nanorod arrays. Appl Phys Lett 82:4358–4360

    Article  Google Scholar 

  23. Goldberger J, Hochbaum AI, Fan R, Yang P (2006) Silicon vertically integrated nanowire field effect transistors. Nano Lett 6:973–977

    Article  Google Scholar 

  24. Vayssieres L (2003) Growth of arrayed nanorods and nanowires of ZnO from aqueous solutions. Adv Mater 15:464–466

    Article  Google Scholar 

  25. Zhang Q, Gao L (2003) Preparation of oxide nanocrystals with tunable morphologies by the moderate hydrothermal method: insights from rutile TiO2. Langmuir 19:967–971

    Article  Google Scholar 

Download references

Acknowledgements

Authors are thankful to DIBS which is an integral part of Sophisticated Instrument Centre (SIC) of IIT Indore. Mangal Das, Md. Arif Khan, Ritesh Bhardwaj, Gaurav Siddharth and Biswajit Mandal would like to thank, Ministry of Electronics and Information Technology (MeitY), Government of India, for providing fellowship under Visvesvaraya Ph.D. Scheme for Electronics and Information Technology. Prof. Shaibal Mukherjee is thankful to MeitY, Government of India for the Young Faculty Research Fellowship (YFRF) under the Visvesvaraya Ph.D. Scheme for Electronics and Information Technology.

Author information

Authors and Affiliations

  1. Hybrid Nanodevice Research Group (HNRG), Electrical Engineering, Indian Institute of Technology Indore, Simrol, Indore, 453552, India

    Shaibal Mukherjee

Authors
  1. Shaibal Mukherjee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Shaibal Mukherjee.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Mukherjee, S. Thin film deposition from dual ion beam sputtering system. CSIT 7, 99–104 (2019). https://doi.org/10.1007/s40012-019-00253-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s40012-019-00253-8

Keywords

Search

Navigation