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Thermodynamics equilibrium analysis on the chemical vapor deposition of HfC as coatings for ceramic matrix composites with HfClx(x = 2–4)-CyHz(CH4, C2H4 and C3H6)-H2-Ar system

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Abstract

A detailed thermodynamic equilibrium analysis in the chemical vapor deposition of HfC as coatings for ceramic matrix composites with HfClx(x = 2–4)-CyHz(CH4, C2H4 and C3H6)-H2-Ar system has been investigated using the FactSage code. To protect the excellent performance of the composites, we demand a suitable composition and yield of condensed phases. They have been examined as functions of the inject reactant ratios of HfClx/(HfClx + CyHz) and H2/(HfClx + CyHz), temperatures, and pressures. The results show that the HfCl4 species are the optimal Hf-source in the deposition process. The ideal ratio parameters for production of single phase HfC are Log[H2/(HfCl4 + CyHz)] = 2 and Hf/C = 1. And the optimum temperature condition is above 1200 K. A lower pressure of 5 kPa is found to be more favorable for the deposition of a pure HfC phase. The co-deposition of HfC with C or Hf will be easily obtained by only controlling the ratios of HfCl4/(HfCl4 + CyHz) and H2/(HfCl4 + CyHz). The HfCl4-C3H6-H2 precursor system should be the best choice in the experiment due to a higher yield of HfC at the same deposition conditions. The results in this work will be helpful for the further experiment investigation under different deposition conditions and put forward a new idea in exploration of the preparation method of coatings for ceramic matrix composites.

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Funding

The authors would like to acknowledge the financial support of Natural Science Foundation of China (51672218), Shaanxi science and technology research and development projects (2014K08-20), Creative Research Foundation of Science and Technology on Thermostructural Composite Materials Laboratory (6142911020106), the Research Fund of the State Key Laboratory of Solidification Processing (NWPU, SKLSP201645), China (Grant No. 145-QZ-2016), and the special fund for basic scientific research of central colleges of Chang’an University (No. 0012-310600161000).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Chang’an University, Xi’an, 710064, People’s Republic of China

    Juanli Deng, Baofu Lu, Kaiyue Hu & Bohan Zheng

  2. Science and Technology on Thermostructural Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, 710072, People’s Republic of China

    Juanli Deng, Shangwu Fan, Laifei Cheng & Litong Zhang

  3. State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi’an, 710072, People’s Republic of China

    Juanli Deng & Shangwu Fan

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  1. Juanli Deng
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Deng, J., Lu, B., Hu, K. et al. Thermodynamics equilibrium analysis on the chemical vapor deposition of HfC as coatings for ceramic matrix composites with HfClx(x = 2–4)-CyHz(CH4, C2H4 and C3H6)-H2-Ar system. Adv Compos Hybrid Mater 2, 102–114 (2019). https://doi.org/10.1007/s42114-018-0069-7

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