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PLD and RF-PLD synthesis of Ba0.6Sr0.4TiO3 ferroelectric thin films for electrically controlled devices

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Abstract

Ba0.6Sr0.4TiO3 (BST) bulk ceramic synthesized by solid state reaction was used as target for thin films grown by pulsed laser deposition (PLD) and radiofrequency beam assisted PLD (RF-PLD). The X-ray diffraction patterns indicate that the films exhibit a polycrystalline cubic structure with a distorted unit cell. Scanning Electron Microscopy investigations showed a columnar microstructure with size of spherical grains up to 150 nm. The capacitance–voltage (C–V) characteristics of the BST films were performed by applying a DC voltage up to 5 V. A value of 280 for dielectric constant and 12.5% electrical tunability of the BST capacitor have been measured at room temperature.

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Nedelcu, L., Ioachim, A., Toacsan, M.I. et al. PLD and RF-PLD synthesis of Ba0.6Sr0.4TiO3 ferroelectric thin films for electrically controlled devices. Appl. Phys. A 93, 675–679 (2008). https://doi.org/10.1007/s00339-008-4694-9

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