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Raman Spectroscopy of Carbon Based Films – Spectra Interpretation and Selected Applications

Raman Spektroskopie von Kohlenstoff-Basisschichten – Spektren-Interpretation und ausgewählte Beispiele

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Zusammenfassung

Die Untersuchung der strukturellen Eigenschaften von diamantähnlichen Kohlenstoffbasisschichten war das Ziel dieser Arbeit. Schichten der strukturellen Systeme, wie wasserstoffhältige tetraedrisch gebundene amorphe Kohlenstoffschichten (ta-C:H), Silizium dotierte wasserstoffhältige amorphe Kohlenstoffschichten (a-C:H:Si) und Stickstoff dotierte amorphe Kohlenstoffschichten (a-C:N), wurden mit den Verfahren Ionenstrahlabscheidung, reaktives Magnetronkathoden-Zerstäuben und gepulste Laser-Dampfphasenabscheidung im infraroten Wellenlängenbereich (IR-PLD; λ=1064 nm) hergestellt. Mit Hilfe der Raman-Spektroskopie konnte gezeigt werden, dass im Falle von Abscheidetechniken mit hohen Ionenenergien (Ionenstrahlabscheidung) der schichtbildenden Kohlenstoffspezies eine Kontrolle der Struktur der ta-C:H-Schichten über die Entladungsspannung, d. h. ~ Partikelenergie, möglich ist. Im Gegensatz dazu erfordert die Optimierung der Schichtstruktur und der Schichteigenschaften der a-C:H:Si- und a-C:N-Schichten die Untersuchung der Einflüsse der Inert-Gas/Reaktiv-Gas-Flüsse und der Reaktivgasart beim Magnetronkathoden-Zerstäuben und bei der IR-PLD.

Summary

The investigation of the film structure of diamond-like carbon films was the main objective of this work. Films within the structural systems of hydrogenated tetrahedral amorphous carbon (ta-C:H), silicon doped hydrogenated amorphous carbon (a-C:H:Si) and nitrogen doped amorphous carbon (a-C:N) were deposited at substrate temperatures of well below 100 °C. As deposition methods ion beam deposition, reactive unbalanced magnetron sputtering of silicon as well as infrared pulsed laser deposition (IR-PLD; λ=1064 nm) were studied. By the use of Raman spectroscopy it was found, that for high kinetic ion energy film deposition processes, i.e. ion beam deposition, the structure and properties of the ta-C:H films can be controlled by the kinetic energy of carbon species involved during film growth. For deposition techniques being typically known for low ion energies like magnetron sputtering or IR-PLD, applied for deposition of a-C:H:Si and a-C:N films, process tuning involves the study of the effects of inert gas/ reactive gas flow and the type of the reactive gas.

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References

  • Robertson, J.: Diamond-like amorphous carbon. Mater. Sci. Eng. R37 (2002), 129–281

    Article  Google Scholar 

  • Pharr, G.M., D.L. Callahan, S.D. McAdams, T.Y. Tsui, S. Anders, A. Anders, J.W. Ager, I.G. Brown, C.S. Bhatia, S.R.P. Silva, and J. Robertson: Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing. Appl. Phys. Lett. 68 (1996), 779–781

    Article  Google Scholar 

  • McKenzie, D.R.: Tetrahedral bonding in amorphous carbon. Rep. Prog. Phys. 59 (1996), 1611–1664

    Article  Google Scholar 

  • Fallon, P.J., V.S. Veerasamy, C.A. Davis, J. Robertson, G.A.J. Amaratunga, W.I. Milne, and J. Koskinen: Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy. Phys. Rev. B 48 (1993), 4777–4782

    Article  Google Scholar 

  • Raman C.V.: A Change of wave-length in light scattering. Nature 121 (1928) 619–619

    Article  Google Scholar 

  • Yu, P.Y., and M. Cardona: Fundamentals of semiconductors, Springer, Berlin, 1996

    Google Scholar 

  • Ferrari, A.C., and J. Robertson: Raman spectroscopy of amorphous, nanostructured, diamond–like carbon, and nanodiamond. Phil. Trans. R. Soc. Lond. A, 362 (2004), 2477–2512

    Article  Google Scholar 

  • Gilkes, K.W., H.S. Sands, D.N. Batchelder, J. Robertson, and W.I. Milne: Direct observation of sp3 bonding in tetrahedral amorphous carbon using ultraviolet Raman spectroscopy. Phys. Lett. 70 (1997), 1980–1982

    Google Scholar 

  • Gilkes, K.W., S. Prawer, K.W. Nugent, J. Robertson, H.S. Sands, Y. Lifshitz, and X. Shi: Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy. J. Appl. Phys. 87 (2000), 7283–7289

    Article  Google Scholar 

  • Merkulov, V.I., J.S. Lannin, C.H. Munro, S.A. Asher, V.S. Veerasamy, and W.I. Milne: UV studies of tetrahedral bonding in diamondlike amorphous carbon. Phys. Rev. Lett. 78 (1997), 4869–4872

    Article  Google Scholar 

  • Ferrari, A.C., and J. Robertson: Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon. Phys. Rev. B64 (2001), 075414–075426

    Article  Google Scholar 

  • Tuinstra, F., and J.L. Koening: Raman spectrum of graphite. J. Chem. Phys. 53 (1970), 1126–1130

    Article  Google Scholar 

  • Ferrari, A.C., and J. Robertson: Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B 61 (2000), 14095-14107

    Article  Google Scholar 

  • Castiglioni, C., F. Negri, M. Rigolio, and G. Zerbi: Raman activation in disordered graphites of the A1′ symmetry forbidden k ≠ 0 phonon: The origin of the D line. J. Chem. Phys. 115 (2001), 3769–3778

    Article  Google Scholar 

  • Castiglioni, C., E. Di Donato, M. Tommasini, F. Negri, and G. Zerbi: Multi-wavelength Raman response of disordered graphitic materials: models and simulations. Synth. Metals 139 (2003), 885–888

    Article  Google Scholar 

  • Castiglioni, C., M. Tommasini, and G. Zerbi: Raman spectroscopy of polyconjugated molecules and materials: confinement effect in one and two dimensions. Phil. Trans. R. Soc. Lond. A362 (2004), 2425– 2459

    Article  Google Scholar 

  • Casiraghi, C., A.C. Ferrari, and J. Robertson: Raman spectroscopy of hydrogenated amorphous carbons. Phys. Rev. B 72 (2005), 085401–085414

    Article  Google Scholar 

  • Kahn, M.: Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties, PhD thesis, University of Leoben, 2009

  • Kahn, M., S. Paskvale, M. Cekada, T. Schoeberl, W. Waldhauser, C. Mitterer, E. Brandstaetter, and P. Pelicon: The relationship between structure and mechanical properties of hydrogenated amorphous carbon films. Diamond and Relat. Mater. 19 (2010), 1245–1248

    Article  Google Scholar 

  • Pelicon, P., A. Razpet, S. Markelj, I. Čadež, and M. Budnar: Elastic recoil detection analysis of hydrogen with 7Li ions using a polyimide foil as a thick hydrogen reference. Nucl. Instr. and Meth. B 227 (2005), 591–596

    Article  Google Scholar 

  • Oliver, W.C., and G.M. Pharr: An improved technique for determining hardness and elastic modulus using load and displacement sensing experiments. J. Mater. Res. 1 (1992), 1564–1583

    Article  Google Scholar 

  • Kahn, M., M. Cekada, R. Berghauser, W. Waldhauser, C. Bauer, C. Mitterer, and E. Brandstaetter: Accurate Raman spectroscopy of diamond-like carbon films deposited by an anode layer source. Diamond Relat. Mater. 17 (2008), 1647–1651

    Article  Google Scholar 

  • Kahn, M., M. Cekada, T. Schoeberl, R. Berghauser, C. Mitterer, C. Bauer, W. Waldhauser, and E. Brandstaetter: Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source. Thin Solid Films 517 (2009), 6502–6507

    Article  Google Scholar 

  • Ferrari, A.C.: Diamond-like carbon for magnetic storage disks. Surf. Coat. Technol. 180–181 (2004), 190–206

    Article  Google Scholar 

  • Veerasamy, V.S., H.A. Luten, R.H. Petrmichl, and S.V. Thomsen: Diamond-like amorphous carbon coatings for large areas of glass. Thin Solid Films 442 (2003), 1–10

    Article  Google Scholar 

  • Gradowski, M.v., A.C. Ferrari, R. Ohr, B. Jacoby, H. Hilgers, H.H. Schneider, and H. Adrian: Resonant Raman characterisation of ultra-thin nano-protective carbon layers for magnetic storage devices. Surf. Coat. Technol. 174–175 (2003), 246–252

    Article  Google Scholar 

  • Casiraghi, C., A.C. Ferrari, J. Robertson, R. Ohr, M. v. Gradowski, D. Schneider, and H. Hilgers: Ultra-thin carbon layer for high density magnetic storage devices. Diamond Relat. Mater. 13 (2004), 1480– 1485

    Article  Google Scholar 

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  1. Joanneum Research Forschungsgesellschaft mbH, Niklasdorf, Austria

    Markus Kahn & Wolfgang Waldhauser

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  1. Markus Kahn
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  2. Wolfgang Waldhauser
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Correspondence to Markus Kahn.

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Kahn, M., Waldhauser, W. Raman Spectroscopy of Carbon Based Films – Spectra Interpretation and Selected Applications. Berg Huettenmaenn Monatsh 155, 534–540 (2010). https://doi.org/10.1007/s00501-010-0612-5

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  • DOI: https://doi.org/10.1007/s00501-010-0612-5

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