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Effect of in-plane ordering on dielectric properties of highly {111}-oriented bismuth–zinc–niobate thin films

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Abstract

Bi1.5−x Zn0.92−y Nb1.5O6.92−δ (BZN) thin films were grown by pulsed laser deposition on two different Pt-covered substrates, namely textured {111}Pt/TiO2/SiO2/(100)Si substrate (Pt/Si) and epitaxial {111}Pt/R-plane sapphire substrate (Pt/sapphire). In both cases, the BZN films present {111} and {100} out-of-plane orientations, in relative ratios of 65:35 on Pt/Si and 80:20 on Pt/sapphire, respectively. The film grown on Pt/Si is textured, while the film deposited on Pt/sapphire presents epitaxial-like relationships with the substrate, for both out-of-plane orientations. Dielectric measurements were taken on both types of thin films, using Pt/BZN/Pt planar capacitor structures. The BZN/Pt/sapphire film presents higher dielectric constant (245 at 100 kHz) and higher tunability (12% at 600 kV/cm) than the BZN/Pt/Si film (200; 6%), while the dielectric losses values are nearly same (~0.05).

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Acknowledgements

The authors acknowledge the Romanian Ministry of Research and Innovation (core program/project PN-III-16-48-02) for their financial support. I. Peron and F. Gouttefangeas are acknowledged for EDS analyses and J. Le Lannic for FE-SEM images taken at CMEBA (ScanMAT, UMS 2001 CNRS-University of Rennes 1) which received a financial support from the Région Bretagne and the European Union (CPER-FEDER 2007–2014, Présage Nos. 39126 and 37339).

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Le Febvrier, A., Députier, S., Demange, V. et al. Effect of in-plane ordering on dielectric properties of highly {111}-oriented bismuth–zinc–niobate thin films. J Mater Sci 52, 11306–11313 (2017). https://doi.org/10.1007/s10853-017-1297-x

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