Abstract
Bi1.5−x Zn0.92−y Nb1.5O6.92−δ (BZN) thin films were grown by pulsed laser deposition on two different Pt-covered substrates, namely textured {111}Pt/TiO2/SiO2/(100)Si substrate (Pt/Si) and epitaxial {111}Pt/R-plane sapphire substrate (Pt/sapphire). In both cases, the BZN films present {111} and {100} out-of-plane orientations, in relative ratios of 65:35 on Pt/Si and 80:20 on Pt/sapphire, respectively. The film grown on Pt/Si is textured, while the film deposited on Pt/sapphire presents epitaxial-like relationships with the substrate, for both out-of-plane orientations. Dielectric measurements were taken on both types of thin films, using Pt/BZN/Pt planar capacitor structures. The BZN/Pt/sapphire film presents higher dielectric constant (245 at 100 kHz) and higher tunability (12% at 600 kV/cm) than the BZN/Pt/Si film (200; 6%), while the dielectric losses values are nearly same (~0.05).
Similar content being viewed by others
References
Kong LB, Li S, Zhang TS, Zhai JW, Boey FYC, Ma J (2010) Electrically tunable dielectric materials and strategies to improve their performances. Prog Mater Sci 55:840–893
Gevorgian S (2009) Ferroelectrics in microwave devices, circuits and systems: physics, modelling, fabrication and measurements. Springer, London
Simon Q, Corredores Y, Castel X, Benzerga R, Sauleau R, Mahdjoubi K, Le Febvrier A, Députier S, Guilloux-Viry M, Zhang L, Laurent P, Tanné G (2011) Highly tunable microwave stub resonator on ferroelectric KTa0.5Nb0.5O3 thin film. Appl Phys Lett 99:092904
Kim H-S, Kim H-G, Kim I-D, Kim K-B, Lee J-C (2005) High-tunability and low-microwave-loss Ba0.6Sr0.4TiO3 thin films grown on high-resistivity Si substrates using TiO2 buffer layers. Appl Phys Lett 87:212903
Ren W, Trolier-McKinstry S, Randall CA, Shrout TR (2001) Bismuth zinc niobate pyrochlore dielectric thin films for capacitive applications. J Appl Phys 89:767–774
Thayer RL, Randall CA, Trolier-McKinstry S (2003) Medium permittivity bismuth zinc niobate thin film capacitors. J Appl Phys 94:1941–1947
Nino JC, Lanagan MT, Randall CA (2001) Dielectric relaxation in Bi2O3–ZnO–Nb2O5 cubic pyrochlore. J Appl Phys 89:4512–4516
Zhang X, Ren W, Shi P, Wu X, Chen X, Yao X (2013) Structures and dielectric properties of pyrochlore bismuth zinc niobate thin films with zinc compensation. J Alloys Compd 553:8–13
Hong YP, Ha S, Lee HY, Lee YC, Ko KH, Kim D-W, Hong HB, Hong KS (2002) Voltage tunable dielectric properties of rf sputtered Bi2O3–ZnO–Nb2O5 pyrochlore thin films. Thin Solid Films 419:183–188
Lu J, Stemmer S (2003) Low-loss, tunable bismuth zinc niobate films deposited by rf magnetron sputtering. Appl Phys Lett 83:2411–2413
Cao LZ, Fu WY, Wang SF, Wang Q, Sun ZH, Yang H, Cheng BL, Wang H, Zhou YL (2007) C-axial oriented (Bi1.5 Zn0.5)(Zn0.5 Nb1.5)O7 thin film grown on Nb doped SrTiO3 substrate by pulsed laser deposition. J Phys D Appl Phys 40:1460–1463
Le Febvrier A, Galca A-C, Corredores Y, Députier S, Bouquet V, Demange V, Castel X, Sauleau R, Lefort R, Zhang L, Tanné G, Pintilie L, Guilloux-Viry M (2012) Structural, optical and dielectric properties of Bi1.5−x Zn0.92−y Nb1.5O6.92−δ thin films grown by PLD on R-plane sapphire and LaAlO3 substrates. ACS Appl Mater Interfaces 4:5227–5233
Zhang X, Ren W, Shi P, Tian A, Xin H, Chen X, Wu X, Yao X (2010) Influence of substrate temperature on structures and dielectric properties of pyrochlore Bi1.5Zn1.0Nb1.5O7 thin films prepared by pulsed laser deposition. Appl Surf Sci 256:6607–6611
Al Garni SE, Qasrawi AF, Mergen A (2016) Physical properties of the Bi1.5Zn0.92−2x Hf x Nb1.5O6.92 solid solutions. Ceram Int 42:3372–3379
Michael EK, Trolier-McKinstry S (2015) Cubic pyrochlore bismuth zinc niobate thin films for high-temperature dielectric energy storage. J Am Ceram Soc 98:1223–1229
Lee YC, Hong YP, Kim DM, Ko KH (2006) Very high tunable inter-digital capacitor using bismuth zinc niobate thin-film dielectrics for microwave applications. Electron Lett 42:851–853
Lee YC, Ko KH (2010) Tunable coplanar waveguide (CPW line integrating bismuth zinc niobate (BZN) thin films. Prog Electromagn Res Lett 19:75–82
Cao LZ, Fu WY, Wang SF, Wang Q, Sun ZH, Yang H, Cheng BL, Wang H, Zhou YL (2007) Effects of film thickness and preferred orientation on the dielectric properties of (Bi1.5Zn0.5)(Zn0.5Nb1.5)O7 films. J Phys D Appl Phys 40:2906–2910
Duclère JR, Mc Loughlin C, Fryar J, O’Haire R, Guilloux-Viry M, Meaney A, Perrin A, McGlynn E, Henry MO, Mosnier JP (2006) ZnO thin films grown on platinum (111) buffer layers by pulsed laser deposition. Thin Solid Films 500:78–83
Valant M, Davies PK (1999) Synthesis and dielectric properties of pyrochlore solid solutions in the Bi2O3–ZnO–Nb2O5–TiO2 system. J Mater Sci 34:5437–5442. doi:10.1023/A:1004787706600
Roisnel T, Rodriguez-Carvajal J (2001) WinPLOTR: a windows tool for powder diffraction pattern analysis. Mater Sci Forum 378-3:118–123
Le Febvrier A, Députier S, Bouquet V, Demange V, Ollivier S, Galca AC, Dragoi C, Radu R, Pintilie L, Guilloux-Viry M (2012) Ferroelectric and dielectric multilayer heterostructures based on KTa0.65Nb0.35O3 and Bi1.5−x Zn0.92−y Nb1.5O6.92–1.5x−y grown by pulsed laser deposition and chemical solution deposition for high frequency tunable devices. Thin Solid Films 520:4564–4567
Wang X, Wang H, Yao X (1997) Structures, phase transformations, and dielectric properties of pyrochlores containing bismuth. J Am Ceram Soc 80:2745–2748
Nefedov A, Abromeit A, Morawe C, Stierle A (1998) High-resolution x-ray scattering study of platinum thin films on sapphire. J Phys Condens Matter 10:717–730
Vargas R, Goto T, Zhang W, Hirai T (1994) Epitaxial growth of iridium and platinum films on sapphire by metalorganic chemical vapor deposition. Appl Phys Lett 65:1094–1096
Li H-C, Si W, West AD, Xi XX (1998) Thickness dependence of dielectric loss in SrTiO3 thin films. Appl Phys Lett 73:464–466
Oh J, Moon T, Kim T-G, Kim C, Lee JH, Lee SY, Park B (2007) The dependence of dielectric properties on the thickness of (Ba, Sr)TiO3 thin films. Curr Appl Phys 7:168–171
Yang L, Ponchel F, Wang G, Remiens D, Legier J-F, Chateigner D, Dong X (2010) Microwave properties of epitaxial (111)-oriented Ba0.6Sr0.4TiO3 thin films on Al2O3(0001) up to 40 GHz. Appl Phys Lett 97:162909-3
Liu Y, Withers R, Welberry TR, Wang H, Du H-L, Yao X (2008) Structural disorder in BZN-based pyrochlores. J Electroceram 21:401–404
Liu Y, Withers RL, Nguyen B, Wei XY (2007) Towards the development of high-performance, frequency agile, Rf/microwave dielectric ceramics based on nanoscale structural analysis. Aust Ceram Soc 43:75–78
Wei W, Pingfan N, Jinglu F, Weixing W (2014) Mechanism of dielectric nonlinear characteristics in bismuth-based cubic pyrochlores. Ceram Int 40:13841–13845
Brooks Hinojosa B, Asthagiri A, Nino JC (2013) Energy landscape in frustrated systems: cation hopping in pyrochlores. Appl Phys Lett 103:022901
Kamba S, Porokhonskyy V, Pashkin A, Bovtun V, Petzelt J, Nino JC, Trolier-McKinstry S, Lanagan MT, Randall CA (2002) Anomalous broad dielectric relaxation in Bi1.5Zn1.0Nb1.5O7 pyrochlore. Phys Rev B 66:054106
Acknowledgements
The authors acknowledge the Romanian Ministry of Research and Innovation (core program/project PN-III-16-48-02) for their financial support. I. Peron and F. Gouttefangeas are acknowledged for EDS analyses and J. Le Lannic for FE-SEM images taken at CMEBA (ScanMAT, UMS 2001 CNRS-University of Rennes 1) which received a financial support from the Région Bretagne and the European Union (CPER-FEDER 2007–2014, Présage Nos. 39126 and 37339).
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
About this article
Cite this article
Le Febvrier, A., Députier, S., Demange, V. et al. Effect of in-plane ordering on dielectric properties of highly {111}-oriented bismuth–zinc–niobate thin films. J Mater Sci 52, 11306–11313 (2017). https://doi.org/10.1007/s10853-017-1297-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10853-017-1297-x