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Structural investigations of Ge nanoparticles embedded in an amorphous SiO2 matrix

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Abstract

Transmission electron microscopy and X-ray photoelectron spectroscopy analyses are performed to investigate Ge nanoparticles embedded in an amorphous SiO2 matrix. GeSiO thin films are prepared by two methods, sol–gel and radio frequency magnetron sputtering. After the deposition, the sol–gel films are annealed in either N2 (at 1 atm and 800 °C) or H2 (at 2 atm and 500 °C), and the sputtered films in H2 (at 2 atm and 500 °C), to allow Ge segregation. Amorphous Ge-rich nanoparticles (3–7 nm size) are observed in sol–gel films. Crystalline Ge nanoparticles in the high pressure tetragonal phase (10–50 nm size) are identified in the sputtered films. The size of the nanoparticles increases with Ge concentration in the volume of the film. At the film surface, the Ge concentration is much larger that in the volume for both sol–gel and sputtered films. At the same time, at the film surface, only oxidized Ge is observed.

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Acknowledgements

This work was supported from Project No. 471/2009 (ID 918/2008), Ideas Program, National Research, Development and Innovation Plan 2007–2013.

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Authors and Affiliations

  1. National Institute of Materials Physics, 105 bis Atomistilor Street, 077125, Magurele, Romania

    Ionel Stavarache, Ana-Maria Lepadatu, Nicoleta G. Gheorghe, Ruxandra M. Costescu, George E. Stan, Dan Marcov, Adrian Slav, Gheorghe Iordache, Tionica F. Stoica, Valentin S. Teodorescu, Cristian M. Teodorescu & Magdalena Lidia Ciurea

  2. “Politehnica” University of Bucharest, 313 Splaiul Independentei, 060042, Bucharest, Romania

    Vladimir Iancu

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  1. Ionel Stavarache
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  2. Ana-Maria Lepadatu
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  3. Nicoleta G. Gheorghe
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  4. Ruxandra M. Costescu
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  13. Magdalena Lidia Ciurea
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Correspondence to Magdalena Lidia Ciurea.

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Stavarache, I., Lepadatu, AM., Gheorghe, N.G. et al. Structural investigations of Ge nanoparticles embedded in an amorphous SiO2 matrix. J Nanopart Res 13, 221–232 (2011). https://doi.org/10.1007/s11051-010-0021-4

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