Section VII. Accelarators and beam development
Ion beams as high-resolution probes of structure and function

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Abstract

Resolutions down to 50 nm have been achieved with high-energy (MeV). low-current ion beams. Such an ion microprobe can then be used for 2D and 3D imaging, measurements of density and crystallinity and single event studies with precise placement of single ions. This opens up new fields for ion beam analysis.

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