Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
The Amsterdam quintuplet nuclear microprobe
Section snippets
The Amsterdam ion beam facility
The Ion Beam Facility set-up at the “Vrije Universiteit” Amsterdam is illustrated in Fig. 1. It has been built around a 1.7 MV NEC 5SDH-2 dual tandem Pelletron accelerator. At its centre Nitrogen gas is used for electron stripping. The ion source used is a NEC Alphatross charge-exchange RF source. The electron exchange channel makes use of Rubidium vapour. With this set-up experience has been gained in accelerating H, He, D and N ion beams. We plan to install a Duoplasmatron in the near future
The nuclear microprobe
The quintuplet microprobe build in collaboration with the Microanalytical Research Centre, Melbourne, optically resembles the CSIRO-GEMOC system [2], [3] and is illustrated in Fig. 2. It features a quadrupole quintuplet lens system, which when operated in a high excitation orthomorphic mode will have a demagnification factor of 67 and a working distance of 85 mm. The lenses are mounted on a girder that is vibration isolated from the floor. Contrary to the CSIRO-GEMOC system only the lens
The grid shadow measurements
The grid shadow pattern method [4] was used to test the lenses of the system. The parasitic components were found to be very low: close to the minimum detectable limit.
Each lens was tested using the MP2 system [5] at the University of Melbourne. The lens under test was the only ion optical component on the beam line at the time of the test, with all inactive lenses having been physically removed. Also, precautions [6] were taken to minimise parasitic magnetic fields external to the lens. These
Acknowledgments
This work was supported by an ICES/KIS grant from the Dutch ministry of education and sciences (OC&W) and the ministry of economic affairs (EZ). It is also supported by the Foundation for Fundamental Research of Matter (FOM), which is financially supported by the Netherlands Organization for Scientific Research (NWO).
Many thanks to all people involved at the Microanalytical Research Centre in Melbourne for the kind reception and pleasant stay during the weeks the grid shadow measurements were
References (7)
- et al.
Nucl. Instr. and Meth. B
(1999) - et al.
Nucl. Instr. and Meth. B
(2001) Nucl. Instr. and Meth. B
(1998)
Cited by (8)
Beam optics in nuclear microprobe: A review
2021, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :The obtained optimal configuration was confirmed in studies [8], where criterion (6) was used. Such a system was successfully implemented in experimental facilities [52,53], on which the calculated parameters were confirmed. At present, such a system has the maximum reduced collimated acceptance.
Highly-focused boron implantation in diamond and imaging using the nuclear reaction <sup>11</sup>B(p, α)<sup>8</sup>Be
2015, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :Relatively high brightness obtained for production of negative boron ions in sputtering source, combined with excellent transmission of the Tandetron accelerator was fully utilized to deliver sufficient quality of the boron beam to the microprobe beam line. The CMAM microprobe line was built by the Micro-Analytical Research Centre (MARC, Melbourne) and resembles the CSIRO–GEMOC system [20,21]. In this line, suitably combining the quadrupole lens configuration and the beam charge state, high energy heavy ions can be successfully focused with high beam currents (higher than 500 pA).
Effect of rapid thermal annealing on the composition of Au/Ti/Al/Ti ohmic contacts for GaN-based microdevices
2013, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :Ion beam experiments were carried out in the internal microprobe and the standard beamlines at the Centre of Micro-Analysis of Materials (CMAM) of the Universidad Autónoma de Madrid. The microprobe line was built in the Micro-Analytical Research Centre (MARC, Melbourne) and optically resembles the CSIRO–GEMOC system [27,28]. The analysis of metal inter diffusion in control samples was performed in large areas (∼1 mm2) of the ohmic contacts by means of RBS using 2 MeV He+ ions, since these are standard conditions providing good depth resolution.
Rearranging a nanoprobe: Line foci, grid shadow patterns and performance tests
2009, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsA detailed ray-tracing simulation of the high resolution microbeam at the AIFIRA facility
2008, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :More experimental data is needed to proceed from here on and measurements will be performed on the nanobeam line when installed. A widely used and relative straightforward method to analyse the aberrations of a certain quadrupole system is the grid shadow technique [10–13]. Image coordinates are obtained from a grid placed at the image plane and the divergence coordinates are acquired from the corresponding grid shadow pattern, cast on an ion luminescent screen placed a couple of hundred millimetres downstream.
Exploiting the third dimension in nanofabrication technology with scanned high energy ion beams
2006, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :The object now consists of one ensemble of holes with a diameter smaller than 0.1 mm serving as a collimator, and it is mounted on a precision translation system so that a selected collimator set can be brought into the beam and optically aligned. A throughout description of the system can be found in [2]. A diagram of the acquired equipment is shown in Fig. 1.