Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Materials analysis and modification at LIPSION – Present state and future developments
Introduction
Nuclear microprobes (NMPs) are versatile tools that offer a variety of powerful analytical techniques for materials analysis and modification in combination with high spatial resolution [1]. The applications of NMPs in material sciences include quantitative elemental imaging [2], [3], the analysis of the structure and defects in crystalline materials [4], the investigation of the electronic properties of semiconductors [5] as well as the modification of a variety of materials in order to create structures [6] or alter physical properties [7]. In some cases, a series of two-dimensional images can even be combined to form three-dimensional tomographic images [8]. This broad range of applications already indicates that nuclear microprobes are far away from being “push-button devices”, but are still quite experimental. They are constantly improved to enhance their technical capabilities and to keep up with the demands of today’s material sciences. Consequently, the high-energy ion nanoprobe LIPSION which has been operational since 1998 [9], [10] has undergone numerous improvements since that time as will be shown here.
This paper describes the present state and experimental capabilities of LIPSION illustrated with some examples of our recent research activities in material sciences. Furthermore, a prospect on future developments is given.
Section snippets
Modifications and improvements at LIPSION
The LIPSION laboratory was built completely from scratch. With its special basements, the very stable air-conditioning system, the high brightness 3.5 MV Singletron accelerator and the nanoprobe from MARC Melbourne this laboratory has all ingredients for high-performance and high-resolution microprobe work [9]. Starting operation in 1998, it took a few years to become in-depth familiar with the system, to explore its analytical capabilities and to reveal the weak points every system has in order
Present state and analytical capabilities
A schematic view of the LIPSION laboratory in its present state is shown in Fig. 2 where the main components of the system are labeled. The experimental techniques routinely available are Particle Induced X-ray Emission (PIXE), Rutherford Backscattering Spectrometry (RBS), Secondary Electron detection (SE), Ion Beam Induced Charge (IBIC), and Scanning Transmission Ion Microscopy (STIM). These techniques can be combined with ion channeling using the eucentric goniometer. In addition, PIXE and
Examples from materials sciences at LIPSION
One main application in material sciences at LIPSION is the elemental analysis of optoelectronic materials [20] and devices [21] as well as the trace element analysis of carbon-based materials in the sub-ppm region [22]. In addition, the electronic properties of commercially available polycrystalline Si solar cells were recently characterized with IBIC using a new low noise in-vacuum IBIC setup [23].
With the eucentric goniometer installed 2007 and a software developed 2008 automated angular
Future developments
There are several ways to improve the performance and technical capabilities of a microprobe. Increasing the spatial resolution at a given beam current is a challenging task, but equally vital to keep up with the demands of today’s material sciences. At LIPSION increasing the spatial resolution at constant beam current can be achieved by using smaller object but larger aperture diaphragms. After the realigment of the lens system in 2008 grid shadow measurements revealed a parasitic octupole
Conclusion
Over the years, the Leipzig ion nanoprobe LIPSION has been improved in numerous ways in order to enhance its capabilities in materials analysis and modification. It is used for a broad range of applications here and in life sciences as well [33] which, however, does not come without compromises as there is only one nanoprobe beamline available that cannot be dedicated to one specific application only. Nevertheless, LIPSION offers a state-of-the-art performance that makes it a valuable tool in
Acknowledgements
The authors thank R. Werner and C. Pahnke for their support on the construction of the in-vacuum preamplifier and J. Starke for his contribution to the octupole lens construction. Furthermore, the helpful discussions with David N. Jamieson on the octupole stigmator are gratefully acknowledged.
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