Applicability of superposition for responses of resistive sensors in a diluted mixed gas environment
Introduction
With the ongoing concern for a clean environment, interest in applications that exploit the Internet of Things (IOT) continues to grow, and in particular, sensor technologies are increasingly being recognized for their potential value as signal generators [1]. One example of such a device are the gas sensors that are currently used in healthcare and environmental monitoring [2], [3]. Resistive type sensors in particular have attracted significant attention because they have the advantages of easy production, low cost and good sustainability. However, such devices have low selectivity when detecting typical gases in a mixed state because of the sensing mechanism of resistive gas sensors [4]. For most applications, in a mixed-gas environment gas concentrations can be obtained only for a specific gas. To overcome this weakness, many studies have focused on forming sensor arrays and enhancing the pattern response of multiple sensors [5], [6]. In this study, the behaviors of several resistive gas sensors were tested in a mixed-gas environment. The measured responses were compared with calculated values that were obtained using our mathematical formula to determine the potential of using superposition to improve the performance of resistive-type gas sensors.
E. Bornald [7] found that on exposure to a certain reducing gas atmosphere the conductance of a resistive-type sensing material such as SnO2 could be expressed aswhere G0, ci, k and m are the conductance of the sensor in air, the gas concentration of the ith species, the conductance dependence and the exponent constant, respectively. Since the conductance is inversely related to the resistance, Eq. (1) can be re-written aswhere R and R0 are the resistance of the sensor on exposure to a gas i at a concentration ci, and the resistance of the sensor in air, respectively. Thus, Eq. (2) can be further reduced to Eq. (3) using the concept of response S, defined as R0/Rwhere the response dependence, k′, corresponds to R0k. However, in reality it has been found that m can be approximated to 1 for a sensor exposed to low concentrations (a few hundred ppm) of a reducing gas [8]. On the other hand, according to the conductance model for a ceramic pellet sensor [9], the conductance can be written aswhere q, k, T and Vs are the electronic charge, the Planck constant, the temperature and the surface barrier height, respectively. According to the space charge model [10], Vs depends on the square of the amount of ionosorbed species on the surface, expressed as Eq. (5)where ε, ε0, Ni, and Ns are the dielectric constant of the sensor, the permittivity of free space, the net density of ions in the space charge region and the density of the charged species on the surface, respectively. Substitution of Eq. (5) into Eq. (4) gives
When ceramic sensors are exposed to a reducing-gas-containing environment, changes occur in Ns from Ns0 (Ns in air) to Ns0+ ΔNs (ΔNs < 0) through the reaction of the reducing gas with ionosorbed oxygen ions on the surface. Therefore, the conductance of the sensor measured from the reducing gas environment can be written asBecause Ns0 is a small value of only a few percent according to the Weisz limitation [11], ΔNs ∼ 0, and a Taylor series approximation can be applied to Eq. (7) to give
Assuming ΔNs2 ∼ 0, Eq. (8) can be rearranged as
Comparing Eq. (1) with Eq. (9), ΔNs must be proportional to the concentration of the reducing gas, c. If that is true for various reducing gases, we can approximate the total change in the concentration of surface ionosorbed oxygen ions aswhen the sensor is placed in a mixed-gas environment containing n different reducing gases. Substitution of Eq. (10) into Eq. (9) gives the total conductivity of the sensor under mixed-gas conditions as
or, in terms of response
Therefore, when the sensor is exposed to a single gas, the response returns to Eq. (3). If we can obtain responses for various gases independently (e.g., S1, S2, S3…), the total response of the sensor in a mixed-gas environment can be expressed as
Eq. (12) states that we can superimpose the responses of the sensor to individual gases to obtain a total response for the sensor under mixed-gas conditions if k″ and the concentration for each gas are available. This means that solutions can be found for Eq. (12), as we have the same number of equations with concentrations, c. We therefore need to have the same number of different sensors as the number of gases whose concentrations, c, we want to measure. This can be simulated as an array of sensors. For example, assuming that two sensors, sensor 1 and sensor 2, are being used to measure the gas components x and y in a mixed state, their responses S1 and S2 under mixed-gas conditions can be expressed asand the solutions for the gas concentrations of x and y can be extracted as
Section snippets
Experimental
To minimize heat-dissipation through the electrode lines, a three-electrode platform fabricated on a MEMS structure was adopted. Here, the center Au electrode was surrounded by an Au-coated Pt-heater line, as shown in Fig. 1(a). The sensing material was deposited by screen printing on this line-mesh, as shown in Fig. 1(b). The chip size was 1700 × 2000 um and the mesh was 175 × 195 um. This type of sensor usually consumes about 25 mW when 0.6 V is applied to the heater. Packaging is required to mount
Results and discussion
First, the response to a single gas species (toluene or acetone) was measured for each sensor, to obtain k in Eq. (3). The responses of sensor 1 for various respective concentrations of toluene and acetone gases are shown in Fig. 3(a) and (b), while those of sensor 2 for toluene and acetone gases are shown in Fig. 3(c) and (d), respectively. All measurements showed a fast response of less than a few seconds and acceptable recovery, even in highly dilute gas environments.
From Fig. 3(a–d), k″ was
Conclusion
The potential for using superposition to predict the response of resistive-type gas sensors when they are exposed to more than a single gas was tested using two SnO2-based sensors. It is proposed that the selectivity of resistive-type gas sensors could be improved, or individual gas concentrations extracted, based on the observed response values of the sensors and a mathematical formulation. The behavior of two SnO2-based resistive gas sensors was tested in a mixed-gas environment of toluene
Acknowledgement
This study was supported by the KAIST Institute for Information Technology Convergence as the “Mobile Sensor and IT Convergence (MOSAIC) Project”.
Kwang-Min Park received his B.S. and M.S. degrees in Advanced Materials Engineering from Sejong University in 2008 and 2010. Now, he is a Ph.D. candidate in Materials Science and engineering, at Korea Advanced Institute of Science and Technology (KAIST). His current research interests are focused on solid state electrochemical devices and mobile gas sensors.
References (11)
- et al.
Internet of things (IoT): a vision, architectural elements, and future directions
Future Gener. Comput. Syst.
(2013) - et al.
Semiconducting metal oxide sensor array for the selective detection of combustion gases
Sens. Actuators B: Chem.
(2003) - et al.
Electronic tongues for environmental monitoring based on sensor arrays and pattern recognition: a review
Anal. Chim. Acta
(2001) Sens. Actuators
(1983)Surface Sci.
(1971)
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Kwang-Min Park received his B.S. and M.S. degrees in Advanced Materials Engineering from Sejong University in 2008 and 2010. Now, he is a Ph.D. candidate in Materials Science and engineering, at Korea Advanced Institute of Science and Technology (KAIST). His current research interests are focused on solid state electrochemical devices and mobile gas sensors.
Tae-Wan Kim received his B.S. degree from KAIST in 2013. He joined the Department of Materials Science and Engineering at Korea Advanced Institute of Science and Technology (KAIST) as an Integrated Master’s & Ph.D. Program student in 2014. His current research interests include chemical sensors using semiconductor and solid electrolytes.
Jeong-Ho Park received the B.S. degree in electrical engineering from the Korea Aerospace University, Goyang, Korea, in 2010, and the M.S. degree in electrical engineering from Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Korea, in 2012. He is currently working towards Ph. D. degree in electrical engineering from KAIST. His research interests include sensor systems, RF systems for mobile communications, and sensor communications.
Chong-Ook Park received his B.S. degree from Seoul National University in 1979 and M.S. and Ph.D. degrees from Ohio State University in 1985. He joined the Department of Materials Science and Engineering at KAIST in 1988, where he currently works as a professor. He is an organizer of IMCS2016 and a chairman of the Korean Sensor Society for 2016. His current research interests include gas sensors of semiconductor and solid electrochemical types.