Hostname: page-component-848d4c4894-x24gv Total loading time: 0 Render date: 2024-05-14T05:58:50.431Z Has data issue: false hasContentIssue false
  • English
  • Français

Flexible SIW humidity sensors based on nanodiamond sensing films

Published online by Cambridge University Press:  21 April 2023

Chang-ming Chen Open the ORCID record for Chang-ming Chen [Opens in a new window] ,
Lu Chen ,
Yao Yao  and
Ye Peng
Chang-ming Chen*
Affiliation:
College of Communication Engineering, Chengdu University of Information Technology, Chengdu 610225, China
Lu Chen
Affiliation:
Engineering Practice Center, Chengdu Aeronautic Polytechnic, Chengdu 610100, China
Yao Yao
Affiliation:
School of Automation Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China
Ye Peng
Affiliation:
College of Communication Engineering, Chengdu University of Information Technology, Chengdu 610225, China
*
Corresponding author: Chang-ming Chen, E-mail: ccml_ming@126.com
Get access Rights & Permissions [Opens in a new window]

Abstract

In this paper, flexible substrate integrated waveguide (SIW) resonators have been designed and fabricated on polyimide substrates for humidity sensing applications. The proposed SIW resonant cavity allows the resonator to obtain the maximum humidity sensitivity and meet the demand for flexible microwave sensing detection. Meanwhile, the humidity response performance can be further significantly enhanced by introducing nanodiamond (ND) sensing material. Three prototypes of ND-coated SIW sensors with different bending radii are measured to analyze their humidity sensing performance. The experimental results demonstrate that the proposed ND-coated SIW sensor with the minimum bending radius can achieve a maximum humidity sensitivity of 1.09 MHz/% relative humidity (RH) in the high RH region (>75.3% RH) and a low humidity hysteresis of 1.8% in the range of 11.3–97.3% RH. This study provides a promising candidate to realize flexible microwave sensors with excellent sensing performance.

Keywords

Flexiblehumidity sensorsnanodiamondSIW
Type
RFID and Sensors
Information
International Journal of Microwave and Wireless Technologies , Volume 15 , Issue 9 , November 2023 , pp. 1475 - 1482
Check for updates
Copyright
Copyright © The Author(s), 2023. Published by Cambridge University Press in association with the European Microwave Association

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Virtanen, J, Ukkonen, L, Björninen, T, Elsherbeni, AZ and Sydänheimo, L (2011) Inkjet-printed humidity sensor for passive UHF RFID systems. IEEE Transactions on Instrumentation and Measurement 60, 2768–2777.CrossRefGoogle Scholar
Amin, EM, Bhuiyan, MS, Karmakar, NC and Winther-Jensen, B (2014) Development of a low cost printable chipless RFID humidity sensor. IEEE Sensors Journal 14, 140–149.CrossRefGoogle Scholar
Kim, YH, Jang, K, Yoon, YJ and Kim, YJ (2006) A novel relative humidity sensor based on microwave resonators and a customized polymeric film. Sensors and Actuators B 117, 315–322.CrossRefGoogle Scholar
Eyebe, GA, Bideau, B, Boubekeur, N, Loranger, É and Domingue, F (2017) Environmentally-friendly cellulose nanofibre sheets for humidity sensing in microwave frequencies. Sensors and Actuators B 245, 484–492.CrossRefGoogle Scholar
Eyebe, GA, Bideau, B, Loranger, É and Domingue, F (2019) TEMPO-oxidized cellulose nanofibre (TOCN) films and composites with PVOH as sensitive dielectrics for microwave humidity sensing. Sensors and Actuators B: Chemical 291, 385–393.CrossRefGoogle Scholar
Feng, Y, Xie, L, Chen, Q and Zheng, LR (2015) Low-cost printed chipless RFID humidity sensor tag for intelligent packaging. IEEE Sensors Journal 15, 3201–3208.CrossRefGoogle Scholar
Ebrahimi, A, Scott, J and Ghorbani, K (2018) Transmission lines terminated with LC resonators for differential permittivity sensing. IEEE Microwave Wireless Components Letters 28, 1149–1151.CrossRefGoogle Scholar
Ebrahimi, A, Tovar-Lopez, FJ, Scott, J and Ghorbani, K (2020) Differential microwave sensor for characterization of glycerol–water solutions. Sensors and Actuators B: Chemical 321, 1–7.CrossRefGoogle Scholar
Vélez, P, Muñoz-Enano, J and Martín, F (2019) Differential sensing based on quasi-microstrip mode to slot-mode conversion. IEEE Microwave Wireless Components Letters 29, 690–692.CrossRefGoogle Scholar
Chen, CM, Xu, J and Yao, Y (2017) SIW resonator humidity sensor based on layered black phosphorus. Electronics Letters 53, 249–251.CrossRefGoogle Scholar
Ndoye, M, Kerroum, I, Deslandes, D and Domingue, F (2017) Air-filled substrate integrated cavity resonator for humidity sensing. Sensors and Actuators B: Chemical 252, 951–955.CrossRefGoogle Scholar
Wei, Z, Huang, J, Li, J, Li, J, Liu, X and Ni, X (2019) A compact double-folded substrate integrated waveguide re-entrant cavity for highly sensitive humidity sensing. Sensors 19, 1–12.CrossRefGoogle ScholarPubMed
Matbouly, HE, Boubekeur, N and Domingue, F (2015) Passive microwave substrate integrated cavity resonator for humidity sensing. IEEE Transaction on Microwave Theory Techniques 63, 4150–4156.CrossRefGoogle Scholar
Benleulmi, A, Boubekeur, N and Massicotte, D (2019) A highly sensitive substrate integrated waveguide interferometer applied to humidity sensing. IEEE Microwave Wireless Components Letters 29, 68–70.CrossRefGoogle Scholar
Chen, CM, Xu, J and Yao, Y (2018) Fabrication of miniaturized CSRR-loaded HMSIW humidity sensors with high sensitivity and ultra-low humidity hysteresis. Sensors and Actuators B: Chemical 256, 1100–1106.CrossRefGoogle Scholar
Jones, TR, Zarifi, MH and Daneshmand, M (2017) Miniaturized quarter-mode substrate integrated cavity resonators for humidity sensing. IEEE Microwave Wireless Components Letters 27, 612–614.CrossRefGoogle Scholar
Dijvejin, ZA, Kazemi, KK, Zarasvand, KA, Zarifi, MH and Golovin, K (2020) Kirigami-enabled microwave resonator arrays for wireless, flexible, passive strain sensing. ACS Applied. Materials & Interfaces 12, 44256–44264.CrossRefGoogle ScholarPubMed
Zarifi, MH, Deif, S, Abdolrazzaghi, M, Chen, B, Ramsawak, D, Amyotte, M, Vahabisani, N, Hashisho, Z, Chen, W and Daneshmand, M (2018) A microwave ring resonator sensor for early detection of breaches in pipeline coatings. IEEE Transaction on Industrial Electronics 65, 1626–1635.CrossRefGoogle Scholar
Li, X, Wang, YH, Lu, A and Liu, X (2015) Controllable hydrothermal growth of ZnO nanowires on cellulose paper for flexible sensors and electronics. IEEE Sensors Journal 15, 6100–6107.CrossRefGoogle Scholar
Ullah, MA, Islam, MT, Alam, T and Ashraf, FB (2018) Paper-based flexible antenna for wearable telemedicine applications at 2.4 GHz ISM band. Sensors 18, 1–13.CrossRefGoogle ScholarPubMed
Kao, HL, Cho, CL, Zhang, XY, Chang, LC, Wei, BH, Dai, X and Chiu, HC (2014) Bending effect of an inkjet-printed series-fed two-dipole antenna on a liquid crystal polymer substrate. IEEE Antennas and Wireless Propagation Letters 13, 1172–1175.Google Scholar
Jilani, SF, Munozc, MO, Abbasi, QH and Alomainy, A (2019) Millimeter-wave liquid crystal polymer based conformal antenna array for 5G applications. Antennas and Wireless Propagation Letters 18, 84–88.CrossRefGoogle Scholar
Peng, JJ, Qu, SW, Xia, M and Yang, S (2020) Wide-scanning conformal phased array antenna for UAV radar based on polyimide film. Antennas and Wireless Propagation Letters 19, 1581–1585.CrossRefGoogle Scholar
Russell, C, Swithenbank, M, Wood, CD, Burnett, AD, Li, L, Linfield, EH, Davies, AG and Cunningham, JE (2016) Integrated on-chip THz sensors for fluidic systems fabricated using flexible polyimide films. IEEE Transactions on Terahertz Science and Technology 6, 619–624.CrossRefGoogle Scholar
Guo, X, Hang, Y, Xie, Z, Wu, C, Gao, L and Liu, C (2017) Flexible and wearable 2.45 GHz CPW-fed antenna using inkjet-printing of silver nanoparticles on PET substrate. Microwave and Optical Technology Letters 59, 204–208.CrossRefGoogle Scholar
Castro, AT and Sharma, SK (2018) Inkjet-printed wideband circularly polarized microstrip patch array antenna on a PET film flexible substrate material. Antennas and Wireless Propagation Letters 17, 176–179.CrossRefGoogle Scholar
Wang, Z, Qin, L, Chen, Q, Yang, W and Qu, H (2019) Flexible UWB antenna fabricated on polyimide substrate by surface modification and in situ self-metallization technique. Microelectronic Engineering 206, 12–16.CrossRefGoogle Scholar
McGibney, E, Barton, J, Floyd, L, Tassie, P and Barrett, J (2011) The high frequency electrical properties of interconnects on a flexible polyimide substrate including the effects of humidity. IEEE Transactons on Components Packaging and Manufacturing Technology 1, 4–15.CrossRefGoogle Scholar
Chang, K, Kim, YH, Kim, YJ and Yoon, YJ (2007) Functional antenna integrated with relative humidity sensor using synthesised polyimide for passive RFID sensing. Electronics Letters 43, 256–260.CrossRefGoogle Scholar
Salas-Sánchez, AÁ, López-Martín, ME, Rodríguez-González, JA and Ares-Pena, FJ (2017) Design of polyimide-coated Yagi-Uda antennas for monitoring the relative humidity level. IEEE Geoscience and Remote Sensing Letters 14, 961–963.CrossRefGoogle Scholar
Radeva, E, Georgiev, V, Spassov, L, Koprinarov, N and Kanev, S (1997) Humidity adsorptive properties of thin fullerene layers studied by means of quartz micro-balance. Sensors and Actuators B: Chemical 42, 11–13.CrossRefGoogle Scholar
Su, PG and Tsai, JF (2009) Low-humidity sensing properties of carbon nanotubes measured by a quartz crystal microbalance. Sensors and Actuators B: Chemical 135, 506–511.CrossRefGoogle Scholar
Yao, Y and Xue, Y (2015) Impedance analysis of quartz crystal microbalance humidity sensors based on nanodiamond/graphene oxide nanocomposite film. Sensors and Actuators B: Chemical 211, 52–58.CrossRefGoogle Scholar
Yuan, Z, Tai, H, Ye, Z, Liu, C, Xie, G, Du, X and Jiang, Y (2016) Novel highly sensitive QCM humidity sensor with low hysteresis based on graphene oxide (GO)/poly(ethyleneimine) layered film. Sensors and Actuators B: Chemical 234, 145–154.CrossRefGoogle Scholar
Kuznetsova, IE, Anisimkin, VI, Kolesov, VV, Kashin, VV, Osipenko, VA, Gubin, SP, Tkachev, SV, Verona, E, Sun, S and Kuznetsova, AS (2018) Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity. Sensors and Actuators B: Chemical 272, 236–242.CrossRefGoogle Scholar
Ahmad, RK, Parada, AC and Jackman, RB (2011) Nanodiamond-gated silicon ion-sensitive field effect transistor. Applied Physics Letters 98, .CrossRefGoogle Scholar
Williams, OA, Nesladek, M, Daenen, M, Michaelson, S, Hoffman, A, Osawa, E, Haenen, K and Jackman, RB (2008) Growth, electronic properties and applications of nanodiamond. Diamond & Related Materials 17, 1080–1088.CrossRefGoogle Scholar
Mochalin, VN, Shenderova, O, Ho, D and Gogotsi, Y (2012) The properties and applications of nanodiamonds. Nature Nanotechnology 7, 11–23.CrossRefGoogle Scholar
Ahmad, RK, Parada, AC, Hudziak, S, Chaudhary, A and Jackman, RB (2010) Nanodiamond-coated silicon cantilever array for chemical sensing. Applied Physics Letters 97, .CrossRefGoogle Scholar
Yao, Y, Chen, X, Ma, W and Ling, W (2014) Quartz crystal microbalance humidity sensors based on nanodiamond sensing films. IEEE Transactions on Nanotechnology 13, 386–393.CrossRefGoogle Scholar
Yu, X, Chen, X, Yu, X, Chen, X, Ding, X and Zhao, X (2019) Flexible wearable humidity sensor based on Nanodiamond with fast response. IEEE Transactions on Electron Devices 66, 1911–1916.CrossRefGoogle Scholar
Cassivi, Y, Perregrini, L, Arcioni, P, Bressan, M, Wu, K and Conciauro, G (2002) Dispersion characteristics of substrate integrated rectangular waveguide. IEEE Microwave Wireless Components Letters 12, 333–335.CrossRefGoogle Scholar
Salonen, P and Rahmat-Samii, Y (2007) Textile antennas: effects of antenna bending on input matching and impedance bandwidth. IEEE Aerospace and Electronic Systems Magazine 22, 18–22.CrossRefGoogle Scholar
Denisov, SA, Sokolina, GA, Bogatyreva, GP, Grankina, TY, Krasil'nikova, OK, Plotnikova, EV and Spitsyn, BV (2013) Adsorption and electrical properties of nanodiamond powders in the presence of water vapor. Protection of Metals and Physical Chemistry of Surfaces 49, 286–291.CrossRefGoogle Scholar
Wang, RLC, Kreuzer, HJ, Grunze, M and Pertsin, AJ (2000) The effect of electrostatic fields on an oligo (ethylene glycol) molecule: dipole moments, polarizabilities and field dissociation. Physical Chemistry Chemical Physics 2, 1721–1727.CrossRefGoogle Scholar