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Plasma-Deposition of Ag-Containing Polyethyleneoxide-Like Coatings

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Plasmas and Polymers

Abstract

Ag-containing polyethyleneoxide (PEO)-like thin films have been deposited in Radio Frequency Glow Discharges fed with vapors of diethyleneglycol-dimethylether and argon. Proper experimental conditions have been utilized in order to fragment the monomer in the glow and, at the same time, sputter Ag from the silver RF cathode of the reactor, in a way that polyethyleneoxide(PEO)-like coatings with embedded Ag clusters have been deposited at the ground electrode. The compostion of the coatings has been investigated by means of different techniques; the plasma process has been investigated by means of Actinometric Optical Emission Spectroscopy. A correlation has been found between the amount of silver embedded in the coatings and that sputtered in the discharge, monitored by actinometry, that could eventually be utilized to control in situ the deposition process.

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Authors and Affiliations

  1. Department of Chemistry, University of Bari, Centro di Studio per la Chimica dei Plasmi, CNR, 4, via Orabona, 70123, Bari, Italy

    Pietro Favia, Michele Vulpio, Rosamaria Marino & Riccardo d'Agostino

  2. Department of Physics and Chemistry, UNESP, 333 Av. Ariberto P. Cunha, 12500-000, Guaratinguetà, SP, Brasil

    Rogerio Pinto Mota

  3. Istituto per lo Studio di Nuovi Materiali per l'Elettronica, CNR via per Arnesano, 73100, Lecce, Italy

    Massimo Catalano

Authors
  1. Pietro Favia
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  2. Michele Vulpio
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  3. Rosamaria Marino
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  4. Riccardo d'Agostino
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  5. Rogerio Pinto Mota
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  6. Massimo Catalano
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Favia, P., Vulpio, M., Marino, R. et al. Plasma-Deposition of Ag-Containing Polyethyleneoxide-Like Coatings. Plasmas and Polymers 5, 1–14 (2000). https://doi.org/10.1023/A:1009517408368

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