Abstract
TiO2 sol-gel thin films have attracted a large attention for applications which require high refractive index transparent layers. In this work, sol-gel TiO2 layers were prepared by Aerosol-gel deposition followed by a thermal treatment procedure in air. Depending on the experimental conditions, abrasion resistant and high refractive index layers could be obtained after post-treatment at only 110°C. In this paper, the experimental parameters which allow the preparation of functional TiO2 sol-gel layers at such low temperature are discussed. It is concluded that the preparation of high refractive index and mechanically resistant TiO2 layers can be interpreted in terms of competition between polycondensation and densification mechanisms. This result allows to envisage the sol-gel processing at low temperature of multilayer antireflective coatings.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
D.P. Partlow and T.W O'Keeffe, Applied Optics 29(10), 1526 (1990).
L. Yang, S. Scott Saavedra, N.R. Armstrong, and J. Hayes, Anal. Chem. 66, 1254 (1994).
A. Bahtat, M. Bouazaoui, M. Bahtat, and J. Mugnier, Optics Communications 111, 55 (1994).
H. Schmidt and B. Seiferling, MRS Symp. Proc. 73, 739 (1986).
S.M. Melpolder and B.K. Coltrain, MRS Symp. Proc. 121, 811 (1988).
H. Schmidt and M. Popall, SPIE Proc. 1328, 249 (1990).
J.D. Mackenzie, J. of Sol-Gel Science and Technology 2, 81 (1994).
T. Iwamoto and J.D. Mackenzie, J. of Mat. Science 30, 2566 (1995).
I.M. Thomas, SPIE Proc. 1561, 70 (1991).
C. Vautey, M. Burgos, and M. Langlet, Thin Solid Films 347, 184 (1999).
M. Langlet and J.C. Joubert, European Patent 0486393 A1, 1991.
M. Langlet, C. Vautey, and N. Mazeas, Thin Solid Films 299, 25 (1997).
M. Langlet, D. Walz, P. Marage, and J.C. Joubert, Thin Solid Films 221, 44 (1992).
P. Marage, M. Langlet, and J.C. Joubert, Thin Solid Films 238, 218 (1994).
M. Langlet, P. Marage, and J.C. Joubert, Adv. Sci. Technology 5, 267 (1995).
N. Primeau, C. Vautey, and M. Langlet, Thin Solid Films, 310, (1/2), 47 (1997).
C. Vautey, Ph.D. Thesis, Institut National Polytechnique de Grenoble, (1998).
W.C. Oliver and G.M. Pharr, J. Mat. Res. 7(6), 1564 (1992).
M.J. Velasco, F. Rubio, J. Rubio, and J.L. Oteo, Spectroscopy Letters 32(2), 289 (1999).
R.J. Gonzalez and R. Zallen, Physical Review B 55(11), 7014 (1997).
M. Burgos and M. Langlet, Thin Solid Films 349, 19 (1999).
J. Hu, X.-D. Xiao, D.F. Ogletree, and M. Salmeron, Surf. Sci. 327, 358 (1995).
N. Ozer, H. Demiryont, and J.H. Simmons, Applied Optics 30(25), 3661 (1991).
L. Hu, T. Yoko, H. Kozuka, and S. Sakka, Thin Solid Films 219, 18 (1992).
J.T. Cox and G. Hass, Physics of Thin Films (Academic Press, New York, 1964), p. 239.
M.N. Logan, S. Prabakar, and C.J. Brinker, Mat. Res. Soc. Symp. Proc. 346, 115 (1994).
C.J. Brinker and A.J. Hurd, J. Phys. III France 4, 1231 (1994).
M. Burgos and M. Langlet, J. of Sol-Gel Science andTechnology 16, 267 (1999).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Langlet, M., Burgos, M., Coutier, C. et al. Low Temperature Preparation of High Refractive Index and Mechanically Resistant Sol-gel TiO2 Films for Multilayer Antireflective Coating Applications. Journal of Sol-Gel Science and Technology 22, 139–150 (2001). https://doi.org/10.1023/A:1011232807842
Issue Date:
DOI: https://doi.org/10.1023/A:1011232807842