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Integrating graphene into semiconductor fabrication lines

Nature Materials volume 18, pages 525–529 (2019)Cite this article

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Electronic and photonic devices based on graphene have unique properties, leading to outstanding performance figures of merit. Mastering the integration of this unconventional material into an established semiconductor fabrication line represents a critical step towards commercialization.

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Fig. 1: Applications for two-dimensional materials.
Fig. 2: Flow chart for BEOL integration.

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Acknowledgements

All authors acknowledge funding from the European Union H2020 Graphene Flagship project (grant agreement no. 785219).

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Authors and Affiliations

  1. AMO GmbH, Aachen, Germany

    Daniel Neumaier & Max C. Lemme

  2. Infineon Technologies AG, Regensburg, Germany

    Stephan Pindl

  3. Chair for Electronic Devices, RWTH Aachen University, Aachen, Germany

    Max C. Lemme

Authors
  1. Daniel Neumaier
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  2. Stephan Pindl
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  3. Max C. Lemme
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Contributions

All authors conceived this work and collaborated equally in the writing of the text.

Corresponding author

Correspondence to Daniel Neumaier.

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Neumaier, D., Pindl, S. & Lemme, M.C. Integrating graphene into semiconductor fabrication lines. Nat. Mater. 18, 525–529 (2019). https://doi.org/10.1038/s41563-019-0359-7

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