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Molecular glass resists are low molecular-weight organic photoresist materials that readily form stable amorphous glasses above room temperature. We have created new families of molecular glass materials that function as both positive and negative resists capable of producing fine features as small as 35 nm line/space patterns using either extreme UV (13.4 nm) or
D. Yang, S. W. Chang and C. K. Ober, J. Mater. Chem., 2006, 16, 1693 DOI: 10.1039/B514146J
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