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Morphology of thin silver film grown by dc sputtering on Si(001)

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Published under licence by IOP Publishing Ltd
, , Citation S Kundu et al 1998 J. Phys. D: Appl. Phys. 31 L73 DOI 10.1088/0022-3727/31/23/001

0022-3727/31/23/L73

Abstract

The morphology and growth mechanism of silver films approximately 150 Å in thickness on Si(001) substrates have been studied by atomic force microscopy and x-ray reflectivity. The thin films prepared by dc sputtering at room temperature are composed of islands of silver. The shape and size distribution of these islands are studied using these two complementary measurement techniques.

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10.1088/0022-3727/31/23/001