An electrostatic probe technique for RF plasma

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, , Citation N St J Braithwaite et al 1987 J. Phys. E: Sci. Instrum. 20 1046 DOI 10.1088/0022-3735/20/8/018

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1 Dept. of Eng. Sci., Oxford Univ., UK

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0022-3735/20/8/1046

Abstract

The use of electrostatic probes in radio frequency (RF) generated plasmas is discussed. A technique is demonstrated in which the RF potential difference between probe and plasma is removed by driving the probe with synchronous RF of suitable phase and amplitude. An application of this technique is the measurement of electrical structure within a 13.56 MHz argon discharge.

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