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The Theory of Ionization Probability in Sputtering

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Published under licence by IOP Publishing Ltd
, , Citation N D Lang and J K Nørskov 1983 Phys. Scr. 1983 15 DOI 10.1088/0031-8949/1983/T6/002

1402-4896/1983/T6/15

Abstract

A very simple derivation is given of the ionization probability P for negative ions sputtered off a metal surface. The result P ≈ e−(ϕ−A)/cv shows the experimentally observed dependences on work function ϕ, atomic affinity A, and outwards velocity v. Estimates of c show good agreement with experiment, too. The physical picture behind the process is discussed.

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10.1088/0031-8949/1983/T6/002