Silicon based affinity biochips viewed with imaging ellipsometry

In this paper we report on the fabrication of an affinity biochip with a matrix of 900 targets for detection with imaging ellipsometry. Two methods of fabrication of chips are shown: one based on wet etching of a silicon surface and the other on the preparation of so-called tension wells on the silicon surface. The dispensing of reagents and ligands was performed using a pipetting robot equipped with a micro-capillary, a syringe pump and micro-stepping motors. Measurements were performed on the chips in real time with carbohydrate model substances selected for six common lectins. Affinity binding was shown for three of the tested model substances.