Thick-film humidity sensors

The results of an investigation of thick-film humidity sensors based on ceramic materials are discussed in the paper. Thick-film technology is very promising for the production of low cost sensors based on ceramic materials. The technology gives the possibility for reproducible production of sensors with a defined microstructure, determined porosity and proper structure of grains and grain boundaries. Ceramic sensors have advantages over polymer sensors due to their better thermal stability and resistance to chemicals. Properties of thick-film planar humidity sensors based on - (ZCT) ceramics are presented. The influence of and Si additives, as well as firing temperature, on the sensor characteristics are discussed. Impedance spectroscopy measurements determined the correlation between the technological parameters and the electrical properties of humidity sensors. The role of each part of the sensitive material in the electrical conduction process is determined on the basis of measurements and calculated equivalent circuits. The proposed model describes the frequency characteristics at various relative humidities with very good fit to the experimental data. A new approach to the modelling of the impedance frequency dependence by means of an equivalent circuit yields very promising results for sensors.