Quasi-buckling of micromachined beams

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Published under licence by IOP Publishing Ltd
, , Citation U Lindberg et al 1993 J. Micromech. Microeng. 3 183 DOI 10.1088/0960-1317/3/4/003

0960-1317/3/4/183

Abstract

Buckling of structures with imperfections, quasi-buckling (QB), is studied. At the bifurcation load, these structures show a smooth transition into one of the stable postbuckling equilibrium states, instead of the traditional sudden change in deflection characteristics. QB structures can show the classical snap-through buckling behaviour, i.e., a sudden change of postbuckling equilibrium state. The QB is described with a generalized temperature, Tg, representing the compression of the structure. Imperfections and distributed deflection loads are represented by a generalized pressure, pg. Experiments on micromachined beams, exposed to heating (Tg) and to a Lorentz force (pg), verify that the QB phenomena can efficiently transfer a longitudinal stress into a transversal deflection, with a scale-factor depending on both Tg and pg.

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10.1088/0960-1317/3/4/003