On the influence of excited atoms on the electron kinetics of a surface wave sustained argon plasma

and

Published under licence by IOP Publishing Ltd
, , Citation A Bohle and U Kortshagen 1994 Plasma Sources Sci. Technol. 3 80 DOI 10.1088/0963-0252/3/1/010

0963-0252/3/1/80

Abstract

The influence of excited atoms on the characteristics of a surface wave produced argon discharge is investigated. A self-consistent model is used to determine simultaneously the electron energy distribution function, the population densities of the 4s states of argon and the maintaining electric field strength. The theoretical results are compared with spectroscopic measurements of the population densities and with Langmuir probe results for the electron distribution function.

Export citation and abstract BibTeX RIS

Please wait… references are loading.
10.1088/0963-0252/3/1/010