Abstract
A review is presented of the phenomena associated with particles in low pressure plasmas. Dust particles which are typically micrometers in diameter have been observed by laser light scattering in various low-pressure, radiofrequency-excited plasmas. Experiments have been designed so that the origin of the dust material is unambiguous and, to some extent, quantitative. The processes involved in the appearance of the mesoscopic dust particles are outlined and compared with our experimental observations. The source material and its required generation rate, nucleation, charging, growth mechanisms, growth rates, and saturation mechanisms are discussed. The mutual influences of dust and plasma, particularly the role of geometric and circuit boundary conditions in laboratory plasmas, are described.
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