Charging of particles in a plasma

Published under licence by IOP Publishing Ltd
, , Citation J Goree 1994 Plasma Sources Sci. Technol. 3 400 DOI 10.1088/0963-0252/3/3/025

0963-0252/3/3/400

Abstract

Several models that predict the charge of particles in a plasma are reviewed. The simplest is based on orbit-limited probe theory. This basic model can be improved by adding several effects: charge reduction at high dust densities, electron emission, ion trapping and fluctuations. The charge is reduced at high dust densities, when a significant fraction of the charge in the plasma resides on the particles, depleting the plasma. Electron emission due to electron impact or ultraviolet exposure can cause a particle to have a positive charge, which has useful implications for plasma processing, since particles are confined in a discharge only if they have a negative charge. Ion trapping occurs due to ion-neutral collisions within the attractive Debye sphere of a negatively charged particle. Trapped ions reduce the net electric force on a particle. A particle's charge fluctuates because the currents collected from the plasma consist of discrete charges arriving at the particle at random intervals. The root mean square fractional fluctuation level varies as 0.5(N)- 12 / where (N)=(Q)/e is the mean number of electron charges on the particle.

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