Design, fabrication and testing of microlens arrays for sensors and microsystems

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Published under licence by IOP Publishing Ltd
, , Citation Ph Nussbaum et al 1997 Pure Appl. Opt. 6 617 DOI 10.1088/0963-9659/6/6/004

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1 Institut de Microtechnique Neuchâtel, Rue A-L Breguet 2, CH-2000 Neuchâtel, Switzerland

2 University of Erlangen - Nürnberg, Applied Optics, Staudtstraße 7, D-95108 Erlangen, Germany

Dates

  1. Received 8 August 1997

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0963-9659/6/6/617

Abstract

We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.

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