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Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

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Published 9 June 2008 • IOP Publishing Ltd
, , Citation K A Cook-Chennault et al 2008 Smart Mater. Struct. 17 043001 DOI 10.1088/0964-1726/17/4/043001

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Author affiliations

1 Mechanical Engineering and Mechanics Department, Drexel University, Philadelphia, PA 19104, USA

2 Department of Biomedical Engineering, Drexel University, Philadelphia, PA 19104, USA

3 Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48105, USA

4 Department of Materials Science Engineering, University of Michigan, Ann Arbor, MI 48105, USA

5 Department of Biomedical Engineering, University of Michigan, Ann Arbor, MI 48105, USA

Dates

  1. Received 3 August 2007
  2. Published

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0964-1726/17/4/043001

Abstract

Power consumption is forecast by the International Technology Roadmap of Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor industry. The purpose of this paper is threefold: (1) to provide an overview of strategies for powering MEMS via non-regenerative and regenerative power supplies; (2) to review the fundamentals of piezoelectric energy harvesting, along with recent advancements, and (3) to discuss future trends and applications for piezoelectric energy harvesting technology. The paper concludes with a discussion of research needs that are critical for the enhancement of piezoelectric energy harvesting devices.

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10.1088/0964-1726/17/4/043001