Abstract
Electrostatically actuated MEMS switch with resistive contact is presented. Movable electrode of the switch is a beam suspended by torsion springs. Low stiffness of springs allows to achieve the low values of the actuation voltage. Main feature of the switch is a mechanism of the active contact breaking, allowing to solve the problem of adhesive sticking of the beam to the signal electrode. The active opening of the switch is realized by the presence of two driving electrodes. The theoretical analysis, finite element simulation and experimental investigation of the switch characteristics are performed.
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