Click here to close this panel.
Lloyd Harrlott1 and Alexander Liddle1
Published under licence by IOP Publishing Ltd
,
,
Citation Lloyd Harrlott and Alexander Liddle 1997 Phys. World 10 (4) 41
DOI 10.1088/2058-7058/10/4/27
59 Total downloads
Lithography – literally "stone writing" – is a process that is fundamental to the manufacture of integrated circuits. It is improvements in this process that have largely enabled the spectacular advances that have been made in the field of microelectronics over the last three decades.