Phys. Rev. 187, 768 (1969) - Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund

Phys. Rev. 187, 768 – Published 10 November 1969

Abstract

DOI:https://doi.org/10.1103/PhysRev.187.768

©1969 American Physical Society

Authors & Affiliations

See Also

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund

Phys. Rev. 184, 383 (1969)

Issue

Vol. 187, Iss. 2 — November 1969

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