Total dissociation cross section of CF4 and other fluoroalkanes for electron impact

Harold F. Winters and Mitio Inokuti
Phys. Rev. A 25, 1420 – Published 1 March 1982
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Abstract

Various techniques from the field of surface science have allowed the development of a method for measuring the total absolute cross section for electron-impact-induced dissociation of a number of molecules. The technique is particularly reliable for the fluoroalkanes such as CF4, CF3H, C2F6, and C3F8. The total dissociation cross section for CF4 has been measured for energies between threshold (∼ 12.5 eV) and 600 eV. The magnitude of the cross section at its maximum is 5.5×1016 cm2. Less extensive data are presented for CF3H, C2F6, and C3F8. Their cross sections at the maxima are 5.8×1016 cm2, 8.6×1016 cm2, and 1.18×1015 cm2, respectively. Arguments are presented which suggest that the total dissociation cross section for each of these gases is equal to the sum of the cross sections for excitation to all electronic and ionic states, i.e., the total cross section for electronic excitation. The results are discussed from the point of view of the Bethe theory. It is concluded that the Bethe asymptotic behavior is not yet attained in the energy range of these measurements.

  • Received 10 August 1981

DOI:https://doi.org/10.1103/PhysRevA.25.1420

©1982 American Physical Society

Authors & Affiliations

Harold F. Winters

  • IBM Research Laboratory, San Jose, California 95193

Mitio Inokuti

  • Argonne National Laboratory, Argonne, Illinois 60439

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Issue

Vol. 25, Iss. 3 — March 1982

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