Accurate values of the electron-impact ionization cross sections for the rare gases are needed in a variety of contexts. However, despite numerous investigations over many decades, uncertainty as to the correct values has persisted. The pioneering total-cross-section measurements of Rapp and Englander-Golden are generally regarded as the most reliable but no comprehensive study has independently verified their correctness. In this paper, measurements of electron-impact ionization cross sections of helium, neon, argon, krypton, and xenon are reported for energies ranging from the first ionization threshold to 1000 eV. These data confirm the essential correctness of Rapp and Englander-Golden’s total measurements and at the same time provide a complete set of consistent absolute partial cross sections.

• Received 28 November 2001

DOI:https://doi.org/10.1103/PhysRevA.65.042713