Vibrational properties of Al2O3 films on gold, aluminum, and silicon

P. Brüesch, R. Kötz, H. Neff, and L. Pietronero
Phys. Rev. B 29, 4691 – Published 15 April 1984
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Abstract

The vibrational properties of thin films of Al2O3 on Au, Al, and Si have been studied by means of infrared reflection absorption spectroscopy (IRAS). The films have been characterized by x-ray photoelectron spectroscopy (XPS), ultraviolet photoelectron spectroscopy (UPS), transmission electron microscopy, and low-angle x-ray experiments. The latter two techniques have shown that the amorphous films transform to crystalline γAl2O3 after tempering above a critical temperature. XPS and UPS indicate that the films are stoichiometric and continuous down to the monolayer range. IRAS experiments of Al2O3 films on Au with thicknesses ranging between 3 and 200 Å show a striking thickness dependence of the vibrational frequency of the Al-O longitudinal mode. A similar thickness dependence is found for Al2O3 films on Al. This observation can be explained by the use of a simple model which is based on the fact that the restoring forces at the surface are smaller than in the bulk. The transition from amorphous Al2O3 to crystalline γAl2O3 is also reflected in the IRAS experiments of Al2O3 on Si and Al.

  • Received 18 July 1983

DOI:https://doi.org/10.1103/PhysRevB.29.4691

©1984 American Physical Society

Authors & Affiliations

P. Brüesch, R. Kötz, H. Neff, and L. Pietronero

  • Brown Boveri Research Center, CH-5405 Baden, Switzerland

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Issue

Vol. 29, Iss. 8 — 15 April 1984

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