The method of inverting energy-dependent photoelectron-diffraction spectra collected at various emission angles to obtain images of individual atoms is applied to data for adsorbates on silicon. Since the results show considerable artifacts, an analysis of the procedure is done, which leads to a method that is model independent and relies only on the measured spectra. The result shows clean images and dimensional accuracy to about 0.2 Å. For any given point R in space, the method inverts spectra within a small cone whose axis is -R^. The method is based on the experimentally determined phase and magnitude of the field generated by inversion of spectra.

• Received 15 March 1994

DOI:https://doi.org/10.1103/PhysRevB.51.14549