A model to reproduce inelastic electron scattering cross sections as determined from reflection-electron-energy-loss experiments is proposed. This model is an extension of model B from Yubero and Tougaard [Phys. Rev. B 46, 2486 (1992)]. Here, a more general geometry is considered where the incidence and exit angles can be varied. Then, for a given geometry and energy of the primary electrons, the dielectric function of the sample is the only input for the calculations. A systematic study of the behavior of the model is presented for the case of Si and Fe. © 1996 The American Physical Society.

• Received 14 August 1995

DOI:https://doi.org/10.1103/PhysRevB.53.9719