Submicron-scale surface roughening induced by ion bombardment

Elliott A. Eklund, R. Bruinsma, J. Rudnick, and R. Stanley Williams
Phys. Rev. Lett. 67, 1759 – Published 23 September 1991
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Abstract

The scanning tunneling microscope (STM) was used to quantitatively investigate nonequilibrium surfaces of graphite roughened by sputter etching with 5-keV Ar ions. The resulting surface morphology depended strongly on the ion flux and fluence, as well as the sample temperature. The height-correlation functions of the roughened surfaces were calculated directly from the STM topographs and compared to linear-response theory and scaling analyses for the propagation of growing fronts. The surfaces developed correlated structures characterized by a length that diverged with increasing ion fluence.

  • Received 4 January 1991

DOI:https://doi.org/10.1103/PhysRevLett.67.1759

©1991 American Physical Society

Authors & Affiliations

Elliott A. Eklund, R. Bruinsma, and J. Rudnick

  • Department of Physics, University of California, Los Angeles, California 90024-1547

R. Stanley Williams

  • Department of Chemistry and Biochemistry, University of California, Los Angeles, California 90024-1569

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Vol. 67, Iss. 13 — 23 September 1991

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