Abstract
Carbon nitride films deposited by three different methods have been analyzed using in situ Auger electron spectroscopy and ex situ x-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectrometry. The XPS data for all 27 samples indicate that these films have a similar composition consisting of two phases. One phase has a stoichiometry near and is identified as a tetrahedral component. The other phase has a variable stoichiometry from N to N and is identified as predominantly an bonded structure. For a film composition of [N]/[C] < 1, the tetrahedrally bonded component grows only moderately as the nitrogen content of the films is increased.
- Received 7 March 1994
DOI:https://doi.org/10.1103/PhysRevLett.73.118
©1994 American Physical Society