Hydrogen Molecules in Crystalline Silicon Treated with Atomic Hydrogen

K. Murakami, N. Fukata, S. Sasaki, K. Ishioka, M. Kitajima, S. Fujimura, J. Kikuchi, and H. Haneda
Phys. Rev. Lett. 77, 3161 – Published 7 October 1996
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Abstract

We report the first observation of the vibrational Raman spectrum of hydrogen molecules H2 in crystalline silicon treated with hydrogen atoms at 400 °C. The Raman spectrum of H2 in silicon observed at room temperature exhibits a frequency shift of around 4158cm1 and a very broad half-width of approximately 34cm1. An isotope shift was also detected at around 2990cm1 in silicon treated with deuterium atoms at 400 °C. The frequency shifts of the observed lines are in close agreement with those reported for H2 and D2 in the gas, liquid, and solid phases.

  • Received 4 March 1996

DOI:https://doi.org/10.1103/PhysRevLett.77.3161

©1996 American Physical Society

Authors & Affiliations

K. Murakami1, N. Fukata1, S. Sasaki1, K. Ishioka2, M. Kitajima2, S. Fujimura3, J. Kikuchi3, and H. Haneda4

  • 1Institute of Materials Science, University of Tsukuba, Tennoudai 1-1-1, Tsukuba, Ibaraki 305, Japan
  • 2National Research Institute for Metals, Sengen 1-2-1, Tsukuba, Ibaraki 305, Japan
  • 3Process Development Division, Fujitsu Ltd., Kawasaki, Kanagawa 211, Japan
  • 4National Institute for Research in Inorganic Materials, Namiki 1-1, Tsukuba, Ibaraki 305, Japan

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Vol. 77, Iss. 15 — 7 October 1996

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