Abstract
Oxidation of the Si(001) surface was studied by the first principles calculation technique with spin-polarized gradient approximation. We have clarified the apparent barrierless reaction mechanism of the backbond oxidation of the surface Si by incoming molecules. An molecule does not attack directly the backbond but the oxidation occurs via metastable chemisorption states on the Si surface. We have also found that the triplet-to-singlet spin conversion is crucial in explaining the incident energy dependence of the sticking probability of molecules.
- Received 23 June 1997
DOI:https://doi.org/10.1103/PhysRevLett.80.2000
©1998 American Physical Society