Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si<inline-formula><tex-math notation="LaTeX">$_{3}$</tex-math></inline-formula>N<inline-formula><tex-math notation="LaTeX">$_{4}$</tex-math></inline-formula> for Biosensing Applications

Bringing Plasmonics Into CMOS Photonic Foundries: Aluminum Plasmonics on Si-N- for Biosensing Applications | IEEE Journals & Magazine | IEEE Xplore