Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

Caini Zhang; Xiangzhao Wang

doi:10.1117/1.1810141

1 December 2004 Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement

Caini Zhang, Xiangzhao Wang

Author Affiliations +

Optical Engineering, Vol. 43, Issue 12, (December 2004). https://doi.org/10.1117/1.1810141

Abstract

We propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. The interferometer is based on a Fabry-Perot plate. It has a simple structure and is insensitive to external disturbance. Sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. A charge-coupled device (CCD) image sensor is used for measuring the distance between the reflected beams from two faces of the Fabry-Perot plate. From the distance, the initial angle of incidence is calculated. Compared with Michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. The numerical calculation and experimental results verify the usefulness of this novel interferometer.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Caini Zhang and Xiangzhao Wang "Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement," Optical Engineering 43(12), (1 December 2004). https://doi.org/10.1117/1.1810141

Published: 1 December 2004

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