Fabrication and reliability study of a double spiral platinum-based MEMS hotplate

Mahanth Prasad; Dhairya Singh Arya; Vinod Kumar Khanna

doi:10.1117/1.JMM.14.2.025003

5 June 2015 Fabrication and reliability study of a double spiral platinum-based MEMS hotplate

Mahanth Prasad, Dhairya Singh Arya, Vinod Kumar Khanna

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 2, 025003 (June 2015). https://doi.org/10.1117/1.JMM.14.2.025003

Abstract

A MEMS hotplate consisting of a double spiral platinum-based element was designed and simulated using MEMS-CAD tool COVENTORWARE. A platinum resistor of 115 Ω was fabricated on a 0.6 μm-thickSiO2 membrane of size 120 μm×120 μm. The hotplate consumes 54 mW when heated up to 756°C. The temperature coefficient of resistance of platinum was measured and found to be 2.19×10⁻³/°C. The fabrication and reliability testing of the hotplate are described. The test results show that the hotplate can continuously operate at 580°C for 5.5 h and it can sustain at least 60 cycles of pulse-mode operation at 530°C with very low temperature and resistance drifts. The maximum current capability of the hotplate was found to be 13.4 mA without any damage to the structure.

Citation Download Citation

Mahanth Prasad, Dhairya Singh Arya, and Vinod Kumar Khanna "Fabrication and reliability study of a double spiral platinum-based MEMS hotplate," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025003 (5 June 2015). https://doi.org/10.1117/1.JMM.14.2.025003

Published: 5 June 2015

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